Seiko Epson Corporation

Susumu Shinto

Akira Sano

Koji Kitahara

Seiji Yamazaki

Shinichi Yotsuya

Teruyuki Nishimura

Tomonori Matsushita

Katsuji Arakawa

An optical filter includes a substrate, a first reflective film provided on the substrate, a second reflective film disposed to face the first reflective film, and a supporting portion provided on the substrate and supporting the second reflective film. The first reflective film is protected with a first protective film so as not to be exposed and the second reflective film is protected with a second protective film so as not to be exposed.

Wavelength tunable optical filter, optical module, and electronic apparatus

A wavelength variable interference filter includes a fixed substrate, a movable substrate that faces the first substrate, a fixed reflective film that is disposed between the fixed substrate and the movable substrate, and a movable reflective film that is disposed between the fixed reflective film and the movable substrate, in which the fixed substrate transmits light, the fixed reflective film includes silver, and a concentration of a hydroxyl group that the fixed substrate includes is 500 ppm or less or 1000 ppm or more.

Wavelength variable interference filter having substrate hydroxyl group concentration, electronic component, manufacturing method of electronic component, and electronic apparatus

An optical filter includes a stationary substrate and a movable substrate disposed so as to be opposed to each other, a first reflecting film disposed on a movable substrate side of the stationary substrate, a second reflecting film disposed on a stationary substrate side of the movable substrate, and opposed to the first reflecting film, a first protective film disposed so as to overlap the first reflecting film, and having a light transmissive property and electrical conductivity, a second protective film disposed so as to overlap the second reflecting film, and having a light transmissive property and electrical conductivity, a first terminal connected to the first protective film, and a second terminal connected to the second protective film. An electrical connection of the first terminal and the second terminal is electrically switchable.

Optical filter, optical module, electronic apparatus, and method of manufacturing optical filter

An optical filter includes: a lower substrate; a lower mirror provided to the lower substrate; a lower electrode provided to the lower substrate; an upper substrate disposed so as to be opposed to the lower electrode; an upper mirror provided to the upper substrate, and opposed to the lower mirror; and an upper electrode provided to the upper substrate, and opposed to the lower electrode, wherein the upper substrate has a groove surrounding the upper mirror in a plan view, the groove includes a first side surface section, a second side surface section, a bottom surface section, a first end section located between the first side surface section and the bottom surface section, and a second end section located between the second side surface section and the bottom surface section, in a cross-sectional view, and the first end section and the second end section each have a curved surface.

Optical filter including a substrate having a groove with a pair of curved surfaces and analytical instrument

A variable wavelength interference filter includes a stationary substrate, a stationary reflecting film disposed on the entire surface of the stationary substrate opposed to a movable substrate, and formed of a multilayer film, a movable reflecting film opposed to the stationary reflecting film, and a first mirror electrode disposed on the stationary reflecting film.

Interference filter, optical filter device, optical module, and electronic apparatus

An interference filter includes first and second reflecting films opposed to each other across a gap, the first and second reflecting films include an Ag&#x2014;Sm&#x2014;Cu alloy film or an Ag&#x2014;Bi&#x2014;Nd alloy film, the Ag&#x2014;Sm&#x2014;Cu alloy film includes 0.1 atomic %&#x2266;Sm&#x2266;0.5 atomic %, and 0.1 atomic %&#x2266;Cu and &#x2266;0.5 atomic %, and Sm+Cu&#x2266;1.0 atomic %, the Ag&#x2014;Bi&#x2014;Nd alloy film includes 0.1 atomic %&#x2266;Bi&#x2266;3.0 atomic %, and 0.1 atomic %&#x2266;Nd&#x2266;5.0 atomic %, and the thickness of the Ag&#x2014;Sm&#x2014;Cu alloy film or the Ag&#x2014;Bi&#x2014;Nd alloy film is &#x2267;10 nm and &#x2266;40 nm.

Interference filter having Ag&#x2014;Bi&#x2014;Nd alloy film

An interference filter includes a first substrate, a second substrate opposed to the first substrate, a first optical film provided to the first substrate, and a second optical film provided to the second substrate and opposed to the first optical film, at least one of the first and second optical films has a metal film having a reflecting property and a transmitting property with respect to light in a desired wavelength band, a surface and an edge portion of the metal film are covered by a barrier film, and the barrier film is formed of a material having conductivity.

Interference filter, optical module, and electronic apparatus

A wavelength tunable interference filter, an optical apparatus, and an optical component include a first substrate, which includes a first optical film and a first driving electrode, and a second substrate, which includes a support portion that supports the first substrate, a second optical film, and a second driving electrode. The second substrate includes an external connection electrode extending to an outer side of the support portion, and includes an electrode forming surface on which the external connection electrode is disposed. A plurality of protruding portions protruding from the electrode forming surface are formed so as to be arrayed in a direction crossing the extending direction of the external connection electrode.

Wavelength tunable interference filter, method of manufacturing wavelength tunable interference filter, optical apparatus, and optical component

An organic electroluminescent device includes a pixel region in which a plurality of pixels is disposed on a support substrate, each pixel having an electroluminescent element in which at least a first electrode layer, a light-emitting layer, and a second electrode layer are laminated in that order at an upper layer side of an insulating film; a first conductive pattern portion provided at a lower layer side of the insulating film for applying a potential to the second electrode layer; and a second conductive pattern portion which is composed of a conductive film having a sheet resistance lower than that of the second electrode layer and which is provided at the upper layer side of the insulating film to connect the second electrode layer to the first conductive pattern portion. In this organic EL device, the second conductive pattern portion has a third conductive pattern portion which is provided on an upper surface of the first conductive pattern portion at a contact portion composed of a non-forming region of the insulating film and which is in contact with the first pattern portion.

Organic electroluminescent device and electronic apparatus

In a tunable interference filter according to the invention, a second substrate includes a light transmission hole and alight transmissive member provided within the light transmission hole, and the light transmission hole is formed in a tapered shape having a diameter dimension of an inner circumferential surface increasing from the first surface toward the second surface, and the light transmissive member has a light incident surface in parallel to the first reflection surface and the second reflection surface, a light exiting surface in parallel to the first reflection surface and the second reflection surface, and a tapered side surface having a diameter dimension increasing from the first surface toward the second surface, and the tapered side surface is in contact with the inner circumferential surface of the light transmission hole.

Tunable interference filter, light sensor and analytical instrument

A light-emitting device includes a substrate, and a light-emitting element including a lower electrode, a light-emitting function layer, and an upper electrode that are formed on the substrate in that order. At least one auxiliary electrode in a strip shape extends in a first direction on and in contact with the upper electrode. The auxiliary electrode has a cross section taken along the direction intersecting the first direction, having a shape including a tapered portion. The light-emitting device also includes a barrier layer covering the auxiliary electrode and the upper electrode. The barrier layer prevents water and oxygen from penetrating into the light-emitting element.

Growing community of inventors

Shimosuwa, Japan

Susumu Shinto