Ckd Corporation

Kabushiki Kaisha Nextar

Susumu Shibata

Manabu Okuda

Ikuo Futamura

Katsunori Ishigure

Yukio Sato

A shape measuring device includes a light source for generating slit light beam and a polygon mirror for scanning the light beam and illuminating an object to be measured. The device further includes space-coding light beam controlling means, phase-shifting light beam controlling means, and a CCD camera which picks up an optical image of an object to be measured obtained by illumination of the light beam. The space-coding light beam controlling means controls light beam whose distribution of integrated illumination has a stripe patter in accordance with a predetermined code and the phase-shifting light beam controlling means controls light beam whose distribution of integrated illumination has a sine-wave like pattern. The distribution of integrated illumination intensity is possessed by the light beam illuminating within a time period for picking up one frame. With the picked up image information, space-coding shape operating means calculates a rough shape of the object to be measured, phase-shifting shape operating means calculates a precise shape of the object be measured, and then shape combining/operating means combines and calculates the shape of the object to be measured. Because the device combines a rough shape measured with wide range and a precise shape measured with high resolving power, the device can measure shape with wide dynamic range and with high resolution power.

Shape measuring device

Disclosed herein is a high-resolution shape measuring device having a scanning device capable of scanning an object to be measured at a high constant rotational speed. The shape measuring device includes a laser light source for generating flashing laser light, a pattern memory storing different flash patterns of the laser light, a polygon mirror as the scanning device, and a CCD camera for picking up an image formed on the object by the scanning of the laser light, wherein the shape of the object is computed according to image data obtained by the CCD camera. The shape measuring device further includes a motor for rotating the polygon mirror and a photodetector for generating a PD signal when the phase of rotation of the polygon mirror becomes a specific phase. The polygon mirror is rotated so as to scan the object plural times in a pickup time per frame of the CCD camera by using one of the flash patterns, and the flash pattern used is reset by the PD signal and is repeatedly used during the pickup time per frame. Further, the number of times of scanning for actually directing the laser light onto the object can be selected from the number of plural times of scanning performed in the pickup time per frame in order to adjust laser light quantity.

Growing community of inventors

Komaki, Japan

Susumu Shibata