Shinko Electric Company, Ltd.

Susumu Nakagawa

Katsumi Yasuda

Masanao Murata

Tsukasa Sugino

Hitoshi Kawano

Kazumichi Kato

Toshio Miki

Shigeto Suzuki

Masanori Onishi

Yasuyoshi Kitazawa

Toshiyuki Takaoka

Yuushi Sato

Kazunari Kitaji

Motonori Inagaki

Yutaka Nakai

Kouji Miura

The wafer mapping system has an access port for transferring a wafer in and out and detects an accommodated wafer for a cassette in which slots for accommodating and holding inserted wafers are disposed in tiers. The wafer mapping system includes (1) a receiver that is fixed to a member facing the access port for receiving elements arranged serially along a height direction of the cassette, and (2) a transmitter that is disposed movable in an up and down direction of the cassette and transmits a signal toward a wafer accommodated in each of the slots of the cassette. The receiver receives a signal from the transmitter, and thereby the presence or absence of a wafer and a state of a wafer accommodated in each of the slots of the cassette are detected. Thereby, with a simple system configuration, an accommodation state of the wafer can be accurately detected.

Wafer mapping system

A suspension type hoisting apparatus has the position of an elevating portion, which is elevatably suspended from a base via a suspension member, adjusted by a positioning member for positioning the suspension member suspended from a carriage in the horizontal plane. The suspension type hoisting apparatus also includes a position controller for outputting a velocity reference signal on the basis of a deviation between a position reference signal of the positioning member and the actual position thereof, and a velocity controller for outputting a force reference signal being a manipulated variable of the positioning member on the basis of a deviation between the velocity reference signal, of the positioning member, outputted from the position controller and the actual velocity thereof; wherein a sway velocity of the elevating portion is detected. A sway controlling signal, with respect to the positioning member, is generated on the basis thereof, and the sway controlling signal is added to the force reference signal outputted from the velocity controller. Thereby, in a case where there is sway at the elevating portion, the positioning member is equivalently displaced in proportion to a sway velocity of the elevating portion, the sway of the elevating portion is suppressed in a remarkably short time, and at the same time, the elevating portion is accurately positioned at a reference position along with attenuation of sway of the elevating portion.

Suspension type hoisting apparatus

In an overhead hoist transfer having a moving carriage with a hand portion, which holds a load, elevatably suspended therefrom; and a means for teaching an appointed stop position on a placement base, on which said load is placed, to said moving carriage, LEDs 7a and 7b are installed at the hand portion 6, and a position detecting portion 12 consisting of a lens 12a and PSD 12b is installed at the placement base 53 side, in order to automatically and accurately enable a teaching of position correcting data in a short time without use of any manpower. Further, a teaching portion is installed, which detects a deviation between the present stop position and the above appointed stop position on the basis of the relative position of the hand portion 6 with respect to the placement base, which is obtained by the position detecting portion 12, and carries out a teaching to the moving carriage by, for example, radio, whereby it is not necessary for an operator to carry out a teaching by actually moving the hand portion, wherein it is possible to accurately carry out a teaching of position correcting data in a short time.

Overhead hoist transfer

A pickup sensor for picking up an image on a floor is installed on a mobile body with a working machine mounted thereon in order to correct for the position deviation of a working machine due to possible deviation in the stop position of a mobile body to always ensure accurate working without increasing the working time of the overall system at the time of stopping the mobile body at a predetermined position and allowing said working machine to perform predetermined operation according to previously given teaching data. At the time the teaching data is given, the pickup sensor picks up an image (reference picked image) including a regular pattern and a predetermined identification mark formed on a floor. At the time the working machine works, the pickup sensor also picks up an image (on-pause picked image) on the floor surface at the stop position. The reference picked image is compared with the on-pause picked image based on the position of the identification mark, and the teaching data of the working machine is corrected on the basis of the comparison result. This correction does not involve the operation of the movable portions of the working machine or the like and can be accomplished by using an operation switching time which exists between the time when the mobile body has stopped and the time the working machine initiates an operation.

Positional deviation detecting device for a mobile body and position

Growing community of inventors

Ise, Japan

Susumu Nakagawa