Daifuku Co., Ltd.

Susumu Moriya

Yoshiteru Ikehata

Yuichi Morimoto

Shigeto Murayama

Takayoshi Ono

Katsuhiko Ueda

Takayoshi Ohno

A method for processing substrates for a substrate processing facility includes the steps of: performing ventilation of a container with a fan filter unit while a lid of the container is in a closed state, when the container is stored in a storage shelf, and when the container is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.

Method for processing substrates

Glass substrates are transported to a plurality of processing devices to be processed. Certain of the processing devices have associated storage shelf for storing glass substrates and a transfer device. The transfer device is adapted to move the glass substrate between the processing device and the storage shelf and between the storage shelf and the transporting device.

Glass substrate transporting facility

It is an object of the present invention to provide a plate-shaped work piece transporting apparatus that has a fan, a dust-removal filter disposed above this fan, and a plate-shape porous member disposed above the dust-removal filter. By forming a chamber in which air can accumulate between the porous member and the dust-removal filter, it is possible to suppress air pulsations. Further, by providing support members on the porous member, the plate-shaped work piece can be supported and damage thereto can be avoided when the plate-shaped work piece, which is supported by air from the fan, drops to below a set height.

Plate-shaped work piece transporting apparatus

It is an object to provide a plate-shaped work piece transporting apparatus provided with a blowing mechanism for contactlessly supporting a plate-shaped work piece that is transported, where the blowing mechanism is provided with a dust-removal filter and a blowing mechanism for sending air to the lower surface of the plate-shaped work piece via the dust-removal filter. In a first embodiment, a driving mechanism for contacting the plate-shaped work piece and moving it in the transporting direction is provided.

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Shiga-ken, Japan

Susumu Moriya