Agency of Industrial Science and Technology

Other

National Institute of Advanced Industrial Science and Technology

Nec Corporation

Susumu Mizuta

Toshiya Kumagai

Tetsuo Tsuchiya

Takaaki Manabe

Iwao Yamaguchi

Yoshimi Kubo

Tsutomu Yoshitake

Yuichi Shimakawa

Wakichi Kondo

Akira Yabe

Seiji Kurashina

Shigemitsu Shin

Akio Watanabe

Hiroyuki Niino

Hiroshi Yokota

Tsuyoshi Terayama

Yuriko Mizuta, Legal Representative

Tadao Shimizu

Toshihito Sasaki

Kenji Kawaguchi

Susumu Nakamura

Yoji Imai

An infrared sensor manufacturing method according to this invention includes a step of forming a bridge structure of an insulating material on an Si substrate, a step of forming a vanadium oxide thin film on the bridge structure by a dry film forming method, a step of irradiating laser light onto the vanadium oxide thin film to thereby change material properties thereof, a step of forming the vanadium oxide thin film with the changed material properties into a bolometer resistor having a predetermined pattern, and a step of forming a protective layer of an insulating material so as to cover the bolometer resistor having the predetermined pattern and the bridge structure.

Infrared sensor manufacturing method suitable for mass production

A metal complex composition containing complexes having metal species of a rare earth element, barium and copper and ligands of a trifluoroacetic acid or pentafluoropropionic acid ligand, a pyridine ligand and an acetylacetone ligand. A superconductive film may be obtained by applying an organic solvent solution of the above metal complex composition to a substrate and by heat treating the coating.

Rare earth-Ba-Cu complex composition and method of producing superconductor using same

In an infrared ray sensor for a bolometer, a bridge structure body, a resistive element film for the bolometer, and a protection film is formed via a space on a substrate, and is formed into a solution form by dissolving metal organic compound into solvent. The solution is applied and dried. A laser ray is irradiated for the solution with wavelength of 400 nm or less. A bond between carbon and oxygen is decomposed and cut to thereby form an oxide thin-film.

Method for manufacturing infrared ray sensor

An oxide for use in a bolometer with an oxide thin-film formed is manufactured on an insulating substrate. Metal organic compound is dissolved in solvent to form solution during manufacturing the oxide thin-film. The solution is applied on the insulating substrate, and the applied solution is dried. A bond between carbon and oxygen is cut and decomposed by irradiating a laser ray with wavelength of 400 nm or less. A generated oxide is crystallized.

Method of manufacturing oxide thin film for bolometer

There is disclosed a method for producing a metal oxide, which comprises the steps of: dissolving a metal organic compound (e.g. a metal organic acid salt, a metal acetylacetonato complex, and a metal alkoxide having an organic group with 6 or more carbon atoms) in a solvent to provide a state of solution, applying the solution onto a substrate, drying the solution, and subjecting the resultant substrate to irradiation with a laser light of a 400 nm or less wavelength, to form a metal oxide on the substrate. According to that method, a metal oxide can be produced without applying a heat treatment at a high temperature of the degree adopted in the conventionally known application thermal decomposition method.

Method for producing a metal oxide and method for forming a minute pattern

A process for forming a dense, epitaxial metal oxide film on a single crystal substrate, including cleaning the surface of the single crystal substrate, contacting the cleaned surface with a polar organic compound such as a small molecular weight alcohol, so that the cleaned surface adsorbs the polar organic compound, then applying a hydrocarbon solvent solution containing at least one organic group-containing metal compound on the polar organic compound-adsorbed surface, and then heating the substrate to decompose the organic group-containing metal compound and to form a dense epitaxial metal oxide film on the substrate.

Method for preparing dense, epitaxial metal oxide film

A superconductive material including a substrate and a superconductive layer of a double oxide of metals provided on the substrate is produced by a method which comprises the steps of:

Superconductive material and method of preparing same

Growing community of inventors

Ibaraki, Japan

Susumu Mizuta