Ebara Corporation

Susumu Miyake

Yoshinori Ojima

Katsuaki Usui

Kozo Matake

Takanori Inada

Takashi Hozumi

Nobuhito Miyashita

The present invention relates to a dry vacuum pump unit capable of achieving ultimate pressure of about 1 Pa. The vacuum pump unit includes a main pump () disposed at an outside-pressure side, and a booster pump () disposed at a vacuum side. The booster pump () and the main pump () are coupled in series. The booster pump () has a higher pumping speed than that of the main pump (). Each of the main pump () and the booster pump () includes a pair of pump rotors (and), a casing () having an inlet port and an outlet port, and a pair of magnet rotors (and) rotatable with the pair of pump rotors.

Growing community of inventors

Tokyo, Japan

Susumu Miyake