Muratec Automation Co., Ltd.

Susumu Maetaki

Masanao Murata

A stockerincludes a storage FOUP, plural purge units, a measurement FOUPand a stacker crane. The storage FOUPstores a semiconductor wafer inside. The measurement FOUPincludes a flow meter inside. The purge unitincludes a purge shelfhaving plural purge tablesfor placing the storage FOUP, and a nitrogen gas is supplied into the storage FOUPplaced on the purge table. The stacker cranetransports the storage containeronto the purge table, and the measurement FOUPis transported between the plural purge tables

Container transport system and measurement container

A storage apparatus () stores a transported object () from a transporting carriage (), which travels along a track () installed on or near a ceiling () while gripping the transported object. The storage apparatus is provided with a rack portion (), on which the transported object is put; and a support member (), whose upper end is supported by the track or ceiling and whose lower end supports the rack portion. The support member selectively has one of first and second shapes. The first shape allows the transporting carriage to put the transported object onto the rack portion at the predetermined position. The second shape allows the rack portion to move away from a position below the track.

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Ise, Japan

Susumu Maetaki