Honeywell International Inc.

Susanne Grabmeier

Stephane Ferrasse

Susan D Strothers

Frank C Alford

Jaeyeon Kim

Chi Tse Wu

Werner Hort

Robert Prater

Andrew Wragg

The invention includes a target construction having a sputtering region and a flange region laterally outward relative to the sputtering region. The flange region has a front surface disposed on a front face of the construction and a back surface opposing the front surface. An o-ring groove is disposed within the flange region. The o-ring groove has a planar base surface which has a first width and has an orifice disposed along the front surface of the flange. The orifice has a second width as measured parallel relative to the base surface. The second width is greater than the first width. The flange surfaces can additionally be protected from rubbing by a layer of protective material.

Physical vapor deposition target constructions

Growing community of inventors

Munich, Germany

Susanne Grabmeier