Stauffer Chemical Company

Susan W Gersten

Mark A Kuck

Liquid white phosphorus is distilled from red phosphorus in vacuo at 480.degree.-490.degree. C. The vapor is transferred in a conduit maintained at 250.degree. C. and condensed into liquid white phosphorus at room temperature. The liquid white phosphorus is then filtered to eliminate any condensed red phosphorus. The clear, colorless phosphorus produced may be utilized as a source of P.sub.4 species for chemical vapor deposition, sputtering, vacuum deposition, and molecular beam deposition of phosphorus, polyphosphide, and other phosphorus compound films for semiconductor and other applications including insulation and passivation.

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Elmsford, NY, United States of America

Susan W Gersten