Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Entegris, Inc. (2 from 787 patents)
2 patents:
1. 12203022 - Formulations for high selective silicon nitride etch
2. 11421157 - Formulations for high selective silicon nitride etch