International Business Machines Corporation

Susan A Sanchez

Krishna Gandhi Sachdev

Harbans S Sachdev

Richard D Kaplan

Brian H Desilets

A method of image transfer transfer into a substrate by reactive ion etch technique is provided. A mask layer on said substrate is formed by a spin-on film which film is comprised of a mixed organo-functional zircoaluminate or zircotitanate material. The film is dried and cured, and thereafter coated with a radiation sensitive resist. The reist is imagewise exposed and developed, which developing preferably also removes the pattern in the mask exposing the substrate. The substrate is then reactive ion etched, the remaining film acting as a barrier material to the etching.

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Glenham, NY, United States of America

Susan A Sanchez