Applied Materials, Inc.

Suresh Bharatharajan Kudallur

Raman K Nurani

Bharath Ram Sundar

Ramakrishnan S Hariharan

Utkarsha Avinash Dhanwate

Vishwath Ram Amarnath

A method includes obtaining sensor data associated with a deposition process performed in a process chamber to deposit a film stack on a surface of a substrate, wherein the film stack comprises a plurality of layers of a first material and a plurality of layers of a second material. The method further includes obtaining metrology data associated with the film stack. The method further includes training a first machine-learning model based on the sensor data and the metrology data, wherein the first machine-learning model is trained to generate predictive metrology data associated with layers of the first material. The method further includes training a second machine-learning model based on the sensor data and the metrology data, wherein the second machine-learning model is trained to generate predictive metrology data associated with layers of the second material.

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Chennai, India

Suresh Bharatharajan Kudallur