Applied Materials, Inc.

Surendra Kanimihally Setty

Tae Kyung Won

Jrjyan Jerry Chen

Sanjay D Yadav

Shouqian Shao

Jun Li

Embodiments of the disclosure include methods and apparatus for electrostatically coupling a mask to a substrate support in a deposition chamber. In one embodiment, a substrate support is disclosed that includes a substrate receiving surface, a recessed portion disposed about a periphery of the substrate receiving surface, an electrostatic chuck disposed below the substrate receiving surface, and a plurality of compressible buttons disposed within a respective opening formed in the recessed portion that form an electrical circuit with the electrostatic chuck.

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San Jose, CA, United States of America

Surendra Kanimihally Setty