Applied Materials, Inc.

Surender Kumar Gurusamy

Nag B Patibandla

Todd J Egan

Yong Cao

Mingwei Zhu

Daniel Lee Diehl

Weimin Zeng

Edward W Budiarto

Zihao Yang

Niranjan Ramchandra Khasgiwale

Renjing Zheng

A method and apparatus for forming an optical stack having uniform and accurate layers is provided. A processing tool used to form the optical stack comprises, within an enclosed environment, a first transfer chamber, an on-board metrology unit, and a second transfer chamber. A first plurality of processing chambers is coupled to the first transfer chamber or the second transfer chamber. The on-board metrology unit is disposed between the first transfer chamber and the second transfer chamber. The on-board metrology unit is configured to measure one or more optical properties of the individual layers of the optical stack without exposing the layers to an ambient environment.

Optical stack deposition and on-board metrology

Growing community of inventors

Santa Clara, CA, United States of America

Surender Kumar Gurusamy