Samsung Electronics Co., Ltd.

Sungyong Bae

Dongjin Lee

Inho Choi

Sunghyup Kim

Injae Lee

Jeonggil Kim

Jonggu Lee

Yebin Nam

Dohyun Jung

Daegeun Yoon

Dongsik Jeong

Euishin Kim

A substrate processing apparatus includes a table in an exposure chamber that is configured to perform an exposure process on a semiconductor substrate, a guiding device including a first horizontal driving body slidably movable in a first horizontal direction and a guide rail on the first horizontal driving body and having a trench extending in a second horizontal direction, a positioning device connected to the guiding device, the positioning device including a slider, a second horizontal driving body and a substrate stage, the slider configured to slidably move in the second horizontal direction along the trench, the second horizontal driving body connected or fixed to the slider, the substrate stage on the second horizontal driving body and configured to support the semiconductor substrate, and a blocking member between the guide rail and the substrate stage to block an inflow of foreign substances onto the substrate stage.

Substrate processing apparatus

Growing community of inventors

Suwon-si, South Korea

Sungyong Bae