Samsung Electronics Co., Ltd.

Sungwon Cho

Junhyoung Kim

Kyunghyun Kim

Jinho Park

Dougyong Sung

Jeongeun Kim

Byunggon Park

Guiwon Seo

Jonghwa Lee

Youngjin Kwon

Younsok Choi

Hyeongcheol Jeong

Younseon Wang

Jungmo Yang

Dohoon Kwon

A plasma sensor module may include an upper substrate, a lower substrate, at least one probe and a printed circuit board (PCB). The upper substrate may be configured to be exposed to plasma. The lower substrate may contact a lower surface of the upper substrate. The lower substrate may have a thickness that is thicker than a thickness of the upper substrate. The probe may be in the lower substrate. The PCB may be in the lower substrate. The PCB may be configured to apply an alternating current to the probe to detect a density of the plasma. Thus, the structural strength of the plasma sensor module may have improved structural strength.

Plasma sensor module

A memory device includes a lower structure, a stacked structure on the lower structure, the stacked structure including horizontal layers and interlayer insulating layers alternately stacked in a vertical direction, and each of the horizontal layers including a gate electrode, a vertical structure penetrating through the stacked structure in the vertical direction, the vertical structure having a core region, a pad pattern with a pad metal pattern on the core region, a dielectric structure including a first portion facing a side surface of the core region, a second portion facing at least a portion of a side surface of the pad metal pattern, and a data storage layer, and a channel layer between the dielectric structure and the core region, a contact structure on the vertical structure, and a conductive line on the contact structure.

Memory device with metal pad pattern and system including the same

A method and audio apparatus for processing an audio signal are provided. The audio apparatus includes at least one microphone to acquire ambient sound of the audio apparatus, a speaker to output the audio signal, an air pressure regulator including a fluid tube connecting an external space of a housing of the audio apparatus to an internal space of the housing, and configured to adjust a change in an air pressure of the internal space of the housing and an audio signal processor configured to generate an anti-noise signal for canceling noise in the ambient sound by using the acquired ambient sound and output the generated anti-noise signal and the audio signal through the speaker.

Method and apparatus for processing audio signal

Growing community of inventors

Suwon-si, South Korea

Sungwon Cho