Samsung Electronics Co., Ltd.

Sungun Kwon

Seong Hoon Jeong

Hyun-Chul Yoon

Jihee Kim

Kongsoo Lee

Jinhye Bae

Yoongoo Kang

Ho-Kyun An

Jaejong Han

Hanseung Kwak

Sunghoon Choi

Disclosed are semiconductor devices and their fabrication methods. The method includes forming an etching target on a substrate including cell and key regions, forming lower and upper mask layers on the etching target, performing photolithography to form an upper mask pattern including a hole on the cell region, a preliminary key pattern on the key region, a bar pattern on the key region, and a trench between the preliminary key pattern and the bar pattern, forming pillar and dam patterns filling the hole and the trench, performing photolithography to remove the upper mask pattern except for the bar pattern, using the pillar pattern, the dam pattern, and the bar pattern as an etching mask to form a lower mask pattern, and using the lower mask pattern as an etching mask to form an etching target pattern on the cell region and a key pattern on the key region.

Method of fabricating semiconductor device using multipe photolithography for patterning

Semiconductor devices include lower interconnections, upper interconnections crossing over the lower interconnections, selection components disposed at crossing points of the lower interconnections and the upper interconnections, respectively, and memory components disposed between the selection components and the upper interconnections. Each of the selection components may include a semiconductor pattern having a first sidewall and a second sidewall. The first sidewall of the semiconductor pattern may have a first upper width and a first lower width that is greater than the first upper width. The second sidewall of the semiconductor pattern may have a second upper width and a second lower width that is substantially equal to the second upper width.

Semiconductor memory devices having lower and upper interconnections, selection components and memory components

Growing community of inventors

Gyeonggi-do, South Korea

Sungun Kwon