Samsung Electronics Co., Ltd.

Sunghoan Kim

Gyujin Choi

Changeun Joo

Sunghawn Bae

Sunguk Lee

Youngkyu Lim

Chilwoo Kwon

Jeongrim Seo

A semiconductor package includes a redistribution layer, a semiconductor chip disposed on the redistribution layer and an expanded layer surrounding the semiconductor chip, connection terminals on the expanded layer, and a wiring structure electrically connecting the redistribution layer to the connection terminals. Each of the connection terminal includes a seed layer, a terminal base layer including a terminal groove exposing a part of an upper surface of the seed layer on the seed layer and formed of a first metal, a terminal cover layer including a barrier portion filling the terminal groove and a cover base portion covering the barrier portion and the terminal base layer and formed of a second metal, and a terminal protective layer covering the terminal cover layer and formed of a third metal.

Semiconductor package and package-on-package devices including same

The method of manufacturing a connection structure of a semiconductor chip includes: preparing a semiconductor chip having a first surface having a connection pad disposed thereon and a second surface opposing the first surface and including a passivation layer disposed on the first surface and covering the connection pad; forming an insulating layer on the first surface of the semiconductor chip, the insulating layer covering at least a portion of the passivation layer; forming a via hole penetrating through the insulating layer to expose at least a portion of the passivation layer; exposing at least a portion of the connection pad by removing the passivation layer exposed by the via hole; forming a redistribution via by filling the via hole with a conductive material; and forming a redistribution layer on the redistribution via and the insulating layer.

Method of manufacturing connection structure of semiconductor chip and method of manufacturing semiconductor package

Growing community of inventors

Suwon-si, South Korea

Sunghoan Kim