Samsung Electronics Co., Ltd.

Samsung Electro-mechanics Co., Ltd.

Sung Yong Lim

Sang Ki Nam

Kyu Hee Han

Sung-Yeol Kim

Hwan Seok Choe

Min Ju Kim

Young Do Kim

In J Yoon

Gi Woo Lee

Woong Jin Cheon

Sung Hwi Cho

Jung Mo Yang

Jin Young Park

Do Hoon Kwon

Jong Hun Pi

Chan Soo Kang

Seong Ha Jeong

Mee Hyun Lim

A substrate processing apparatus is provided. The substrate processing apparatus includes a chamber comprising a support, the support configured to have mounted thereon a substrate; at least one channel disposed in the chamber and into which a conductive fluid or a non-conductive fluid is configured to be injected; and a control unit. The control unit includes a first pump and a second pump configured to respectively supply the conductive fluid and the non-conductive fluid to the at least one channel; and a first valve configured to receive the conductive fluid and the non-conductive fluid from the first pump and the second pump, respectively, and control proportions at which the conductive fluid and the non-conductive fluid are injected into the at least one channel.

Substrate processing apparatus and substrate processing method

An RF sensing apparatus configured for use with a plasma processing chamber includes a penetration unit opened in an up/down direction, a main return path unit surrounding all or a portion of the penetration unit, and a secondary return path unit located between the penetration unit and the main return path unit, spaced apart from the main return path unit, and surrounding all or a portion of the penetration unit. The main return path unit and the secondary return path unit include a path through which a current flows in one of the up/down directions.

RF sensing apparatus of plasma processing chamber and plasma processing chamber including same

The present invention relates to a deflection yoke, and in particular, to an apparatus for correcting a mis-convergence and geometric distortion in a deflection yoke using a variable resistance, proving a more convenient way to adjust VCR by adjusting the current flowing in a comma-free coil using a variable resistance, instead of attaching a magnetic member as in the conventional method for the products associated with VCR (Vertial Green) properties.

Apparatus for correcting mis-convergence and geometric distortion in deflection yoke using variable resistance

A deflection yoke has a non-magnetic conductor on a screen-bent portion or a neck-bent portion of a vertical deflection coil, and the non-magnetic conductor is connected to ground by means of a lead line for the purpose of eliminating a ringing phenomenon caused by stray capacitance between horizontal and vertical deflection coils, and the vertical deflection coil and a ferrite core, which can be adopted to any saddle-saddle type deflection yokes having saddle-shaped vertical and horizontal deflection coils. A considerable amount of the stray capacitance is passed to the ground, and the ringing phenomenon is improved.

Deflection yoke

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Seoul, South Korea

Sung Yong Lim