Samsung Electronics Co., Ltd.

Sung-Yeul An

Young-Dae Kim

Gon-Su Kang

Seung-Se Lee

Hyun-Sub Earm

In an analyzing chamber for a mass analyzer, a body of the analyzing chamber may include an inlet through which an ion beam enters and an outlet through which the ion beam leaves. A shielding section may be installed on a sidewall. The shielding section may prevent the ion beam traveling along a path in the body from causing damage to the sidewall of the body. A detector may be interposed between the sidewall of the body and the shielding section. The detector may detect an ion beam leaking through the shielding section. Accordingly, damage to the sidewall of the body may be sufficiently reduced and/or prevented.

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Gyeongju-si, South Korea

Sung-Yeul An