Samsung Electronics Co., Ltd.

Sung-yeol Lee

Jae-nam Lee

Jong-Hoon Kim

Jong-in Lee

Hee-Sang Yang

Min-Gu Chang

Chang-hwan Ji

In-Cheol Kim

Yu-Dong Won

Jung-hun Choi

Woo-Chul Jeon

Hee-sang Yang

Provided is an apparatus for inspecting a magazine including a plurality of partially-finished products. The apparatus is configured to inspect a stopper of the magazine before providing the magazine to a packaging process, and further configured to classify the stopper into a normal product. The magazine comprising the stopper classified as the normal product is into the packaging process.

Apparatus for inspecting magazine including stopper

A carrier transfer for automatically transferring a substrate carrier includes a gripper detachably coupled to the substrate carrier, the substrate carrier including a plurality of substrates and at least one open gate through which the plurality of substrates are loaded into or unloaded from the substrate carrier. The gripper includes a gate blocking unit secured to the gripper and configured to shift to a blocking position, the blocking position being a position of the gate blocking unit that partially blocks the gate to prevent the plurality of substrates from being separated from the substrate carrier during the automatic transferring of the substrate carrier.

Automatic carrier transfer for transferring a substrate carrier in a semiconductor manufacturing post-process and method of transferring the substrate carrier using the same

Growing community of inventors

Cheonan-si, South Korea

Sung-yeol Lee