Lucent Technologies Inc.

Triquint Technology Holding Co.

At&t Bell Laboratories

American Telephone & Telegraph Co., At&t Bell Laboratories

Agere Systems Guardian Corp.

Sung-Nee George Chu

Alfred Yi Cho

Federico Capasso

Deborah Lee Sivco

Albert Lee Hutchinson

Alessandro Tredicucci

Claire F Gmachl

Wen-Yen Hwang

James Nelson Baillargeon

David Alan Ackerman

Klaus Alexander Anselm

Jerome Faist

Abdallah Ougazzaden

Liming Zhang

Leonard Jan-Peter Ketelsen

John Evan Johnson

Michael C Wanke

Arthur Mike Sergent

Michael Geva

Charles William Lentz

Naresh Chand

Chung Y Chen

Kuochou Tai

Yuliya Anatolyevna Akulova

Mark S Hybertsen

Eric J Dean

Yeong-Her Wang

Ruedeger Koehler

Claire F Gmachi

Keh-Yeng Cheng

Alexei V Syrbu

A process evaluates an aging property of a distributed Bragg reflector (DBR) laser. The process includes illuminating a Bragg grating of the distributed Bragg reflector (DBR) laser with light while the DBR laser is both supplied a tuning current and not lasing. The process also includes performing an action to the DBR laser responsive to a wavelength of a Bragg peak in a portion of the light reflected by the Bragg grating and a value of the tuning current supplied during the illuminating.

Aging in tunable semiconductor lasers

A method for decreasing the diffusion of dopant atoms in the active region, as well as the interdiffuision of different types of dopant atoms among adjacent doped regions, of optoelectronic devices is disclosed. The method of the present invention employs a plurality of InAlAs and/or InGaAlAs layers to avoid the direct contact between the dopant atoms and the active region, and between the dopant atoms in adjacent blocking structures of optoelectronic devices. A semi-insulating buried ridge structure, as well as a ridge structure, in which the interdiffusion of different types of dopant atoms is suppressed are also disclosed.

Dopant diffusion blocking for optoelectronic devices using InAlAs and/or InGaAlAs

The RT regions of an ISB light emitter comprise pre-biased SLs and a multiplicity of split quantum wells (SPQWs). A SPQW is a quantum well that is divided into a multiplicity of sub-wells by a first barrier layer sufficiently thin that the upper and lower energy states are split beyond their natural broadening and contribute to different minibands in each RT region. In contrast, adjacent SPQWs are coupled to one another by second barrier layers. The thicknesses of the latter layers are chosen so that minibands are created across each RT region. In one embodiment, the emitter includes an I/R region between adjacent RT regions, and in another embodiment the I/R regions are omitted.

Flat minibands with spatially symmetric wavefunctions in intersubband superlattice light emitters

An article comprising a QC-DFB laser is disclosed. In the QC-DFB laser, an overlying grating structure achieves relatively strong coupling of the guided mode to the grating, and is thus highly effective in inducing single-mode operation even under cw operating conditions. The grating structure includes grooves etched in a plasmon-enhanced confinement layer (PECL) disposed adjacent and in contact with an upper metallic electrode. The grating structure and the PECL are designed such that in the grooves, the laser mode travelling in the waveguide can couple efficiently to the surface-plasmon at the electrode interface. This results in strong modulation of the laser mode, leading to strong modulation of, inter alia, the effective refractive index.

Apparatus comprising a quantum cascade laser having improved distributed feedback for single-mode operation

An intersubband semiconductor light source comprises a core region that includes a unipolar, radiative transition (RT) region having upper and lower energy levels, an injector-only (I) region disposed on one side of the RT region, and a reflector/extractor-only (R/E) region disposed on the other side of the RT region. The I region has a first miniband of energy levels aligned so as to inject electrons into the upper energy level, and the R/E region has a second miniband of energy levels aligned so as to extract electrons from the lower energy level. The R/E region also has a minigap aligned so as to inhibit the extraction of electrons from the upper level. A suitable voltage applied across the core region is effective to cause the RT region to generate light at a wavelength determined by the energy difference between the upper and lower energy levels. Low voltage operation at less than 3 V is described.

Intersubband light source with separate electron injector and reflector/extractor

A method of forming selected Group III-nitride regions uses a masking layer to cause differential growth between single crystal Group III-nitride material and polycrystalline Group III-nitride material. The epitaxial process is chosen to provide vertical growth so as to allow for replication of the mask edges at the defined limits for the selected regions. By using an etchant that is selective between polycrystalline and single crystal Group III-nitride material, the polycrystalline material (that grew over the mask layer) can be removed, leaving only the single crystal Group III-nitride (that grew over the exposed substrate material).

Selective growth process for group III-nitride-based semiconductors

The specification describes a method for producing black phosphorus from red phosphorus by thermally cycling red phosphorus in a vacuum between 360-400.degree. C. and 200-240.degree. C., whereupon the red phosphorous undergoes an allotropic phase change to black phosphorus.

Method of making black phosphorus from red phosphorus

A quantum cascade (QC) laser has a multilayer core region comprising alternating layers of a first and a second semiconductor material, with lattice constants a.sub.1 and a.sub.2, respectively. The first material is selected such that a.sub.1 &gt;a.sub.0, where a, is the lattice constant of the substrate (typically InP), and the second material is selected such that a.sub.2 &gt;a.sub.0. The materials are also selected such that the conduction band discontinuity .DELTA.E.sub.c between the first and second materials is greater than 520 meV in absolute value. The multilayer core comprises a multiplicity of essentially identical multilayer repeat units. The layer thicknesses and materials of the repeat units are selected to substantially provide strain compensation over a repeat unit. QC lasers according to this invention preferably comprise a distributed feedback feature, (e.g., a Bragg grating) selected to ensure single mode laser emission, and can be designed for operation at a wavelength in the first atmospheric window, typically about 3-5 .mu.m. Such lasers can advantageously be used for absorption spectroscopy, e.g., for emission monitoring.

Article comprising a strain-compensated QC laser

Heteroepitaxial growth of phosphorus-containing III/V semiconductor material (e.g., InGaAsP) on a non-planar surface of a different phosphorus-containing III/V semiconductor material (e.g., InP) is facilitated by heating the non-planar surface in a substantially evacuated chamber to a mass-transport temperature, and exposing the surface to a flux of at least phosphorus form a solid phosphorus source. This mass-transport step is followed by in situ growth of the desired semiconductor material, with at least an initial portion of the growth being done at a first growth temperature that is not greater than the mass transport temperature. Growth typically is completed at a second growth temperature higher than the first growth temperature. A significant aspect of the method is provision of the required fluxes (e.g., phosphorus, arsenic, indium, gallium) from solid sources, resulting in hydrogen-free mass transport and growth, which can be carried out at lower temperatures than is customary in the prior art. An exemplary and preferred application of the method is in grating formation and overgrowth in InP-based DFB lasers.

Method of making an InP-based device comprising semiconductor growth on

The disclosed novel method of making III/V semiconductor lasers involves cleaving of the wafer along predetermined cleavage planes. A cleavage plane is defined by means of aligned non-continuous depressions. The depressions are spaced from the laser contact regions, and typically are V-grooves produced by photolithography and anisotropic etching. A further surface feature, typically a precisely positioned scribe mark, facilitates cleavage initiation. When carried out in vacuum the novel method can provide high quality, accurately positioned cleavage surfaces, and consequently can facilitate increased yield of high power lasers.

Method of making III/V semiconductor lasers

Disclosed is a method for manufacturing a vertical cavity, surface-emitting laser. The method includes growing a distributed Bragg reflector having at least 10 layers of alternating composition on a gallium arsenide substrate. The growth surface of the substrate is tilted by an angle of 1.degree.-7.degree. from the orientation of a (100) surface toward the orientation of a (111)A surface. This results in improved reflectivity of the DBR.

Method for making a semiconductor laser

Useful field effect transistors can be made with gallium indium arsenide as the electron conducting layer (channel layer) by incorporating a layer of gallium arsenide for the Schottky barrier. Relatively thick gallium arsenide layers are used to achieve low reverse leakage currents.

Gallium arsenide on gallium indium arsenide Schottky barrier device

Growing community of inventors

Murray Hill, NJ, United States of America

Sung-Nee George Chu