Samsung Electronics Co., Ltd.

Samsung Display Co., Ltd.

Industrial Cooperation Foundation Chonbuk National University

Sung-Mo Gu

Jung-Sub Lee

Suk Ho Choi

Seunghee Lee

Hye-won Kim

Young-Jin Noh

Youngjin Noh

Myoung-Ki Ahn

Youngwon Kim

Changhyun Ryu

Young Eun Choi

Chi Youn Chung

Chi-youn Chung

Heung-mo Koo

Il-hyoung Lee

A method for fabricating a substrate includes forming a first substrate including a thin film transistor array, and inspecting a first surface of an inspecting device, wherein inspecting the first surface of the inspection device includes: generating first measurement data by detecting a first measurement light that is parallel to a surface of an inspection region in the first surface, generating second measurement data by detecting a second measurement light that is parallel to the surface of the inspection region, and inspecting a state of a surface of the inspection region by comparing the first measurement data with the second measurement data.

Method of inspecting device using first measurement and second measurement lights

An inspection apparatus for detecting a defect of a substrate is provided. The inspection apparatus includes a liquid crystal modulator, a light emitting unit, a beam splitter, and a measurement unit. The liquid crystal modulator includes a reflection layer, a liquid crystal layer, an electrode, and a polarizer. The reflection layer reflects a light. The sensor layer includes a hybrid aligned nematic liquid crystal. The electrode is provided on the liquid crystal layer. The polarizer is provided on the electrode.

Liquid crystal modulator for detecting a defective substrate and inspection apparatus having the same

An electro-optic modulator can include a polymer film including liquid crystal (LC) droplets in the polymer film and a transparent electrode layer on an upper surface of the polymer film. A cholesteric liquid crystal (CLC) polymer reflection film can be on a lower surface of the polymer film opposite the transparent electrode layer.

Electro-optic modulator including composite materials and testing apparatus including the same

Growing community of inventors

Daegu, South Korea

Sung-Mo Gu