Skhynix Inc.

Sung Lae Oh

Sang Hyun Sung

Soo Nam Jung

Dong Hyuk Kim

Tae Sung Park

Yong Kim

Sang Woo Park

Jin Ho Kim

Dong Hyuk Chae

Hyun Soo Shin

Ki Soo Kim

Chang Man Son

Go Hyun Lee

Young Ki Kim

Dae Sung Eom

Chang Woon Choi

Kwang Hwi Park

Byung Hyun Jeon

Je Hyun Choi

Jae Eun Jeon

Dae Hun Kwak

Kang Sik Choi

Jeong Hwan Kim

Dong Hun Kwak

Soo Yeol Chai

Moon Soo Sung

Hee Joung Park

Tae Seung Shin

Byung Hyun Jun

Woo Pyo Jeong

Won Seok Kim

Yeong Taek Lee

Chang Woo Kang

Seung Pil Lee

Ki Chang Chun

Byung Sub Nam

A semiconductor device includes a gate structure including a first select line, a second select line, a first wordline, a second wordline, and a third select line. The semiconductor device also includes a first channel layer passing through the second wordline and the third select line. The semiconductor device further includes a second channel layer passing through the first wordline and the first select line, the second channel layer connected to the first channel layer, and a third channel layer passing through the first wordline and the second select line, the third channel layer connected to the first channel layer. The semiconductor device additionally includes an isolation structure that isolates the second channel layer from the third channel layer.

Semiconductor device having channel isolation structure

A semiconductor device includes a first semiconductor chip including a memory cell array and a plurality of bit lines; a second semiconductor chip including a peripheral circuit, and bonded to the first semiconductor chip; and a shielding member including a link pattern that is configured in a bonding metal layer of any one of the first semiconductor chip and the second semiconductor chip, and has a grid shape or stripe shapes, and a plurality of island patterns that are configured in a bonding metal layer of the other one of the first semiconductor chip and the second semiconductor chip, and bonded to the link pattern.

Semiconductor device having stacked memory cell array, peripheral circuit and shielding member

A three-dimensional memory device includes a first electrode structure and a second electrode structure extending in a first direction, being adjacent to each other in a second direction intersecting with the first direction, and each including a plurality of electrode layers and a plurality of interlayer dielectric layers which are alternately stacked on a source plate; a plurality of first slimming holes formed in the first electrode structure to expose pad regions of the electrode layers of the first electrode structure, and arranged in the first direction; and a plurality of second slimming holes formed in the second electrode structure to expose pad regions of the electrode layers of the second electrode structure, and arranged in the first direction, wherein a first slimming hole and a second slimming hole which are adjacent in the second direction have different depths.

Three-dimensional memory device

A three-dimensional semiconductor device includes a peripheral circuit device layer that includes a page buffer area, a pass transistor area adjacent to the page buffer layer, and a logic transistor area adjacent to the pass transistor area in the first direction, and a memory cell device layer that includes a cell area and a staircase area extending from the cell area. The peripheral circuit device layer includes transistors, peripheral circuit via plugs, and peripheral circuit interconnection layers on a substrate. The memory cell device layer includes word line stack including interlayer insulating layers and word lines alternately stacked, the word line stack including end portions stacked in a staircase in the staircase area; a bit line array including bit lines arranged in the cell area; and word line pillars electrically connected to the end portions of the word lines in the staircase area, respectively.

Three-dimensional semiconductor device

A semiconductor memory device includes a first semiconductor layer including a memory cell array; a second semiconductor layer including a first substrate and a page buffer circuit which is configured on the first substrate; a third semiconductor layer disposed between the first semiconductor layer and the second semiconductor layer in a vertical direction, and including a second substrate and a second logic circuit which is configured on an element region of the second substrate; and a first contact plug passing through a coupling region of the second substrate which overlaps the page buffer circuit in the vertical direction.

Semiconductor memory device including stacked semiconductor layers

A memory device includes a first semiconductor structure including pass transistors defined in a row decoder region of a substrate, a first bonding layer including first bonding pads, and bottom wiring layers disposed between the substrate and the first bonding layer; a second semiconductor structure including a second bonding layer including second bonding pads bonded to the first bonding pads, a memory cell array, and a top wiring layer disposed between the second bonding layer and the memory cell array; and global lines disposed in the row decoder region, and configured to transfer operating voltages to the pass transistors, wherein the bottom wiring layers include bottom wiring layers of a first tier and bottom wiring layers of a second tier disposed over the bottom wiring layers of the first tier, and the global lines are disposed in at least one of the bottom wiring layers of the first tier.

Memory device including row decoder

A memory device may include an electrode structure including a plurality of electrode layers and a plurality of interlayer dielectric layers that are alternately stacked on a substrate; a trench in the electrode structure, and having an upper sidewall, a lower sidewall and a horizontal portion that couples the upper sidewall to the lower sidewall and that is parallel to a top surface of the substrate; a dielectric layer in the trench; and a slimming hole in the electrode structure having a sidewall of the trench and a region of the dielectric layer, and having a bottom surface disposed on an electrode layer on which the horizontal portion of the trench is positioned.

Memory device and manufacturing method thereof

A semiconductor device includes a stack including a plurality of electrode layers and a plurality of interlayer dielectric layers that are alternately stacked in a vertical direction on a substrate; and a plurality of vertical pass transistors disposed over the stack, and each of the plurality of vertical pass transistors coupled to a corresponding electrode layer, wherein the plurality of vertical pass transistors includes a plurality of first vertical pass transistors and a plurality of second vertical pass transistors, and the plurality of second vertical pass transistors are disposed over the plurality of first vertical pass transistors to be staggered with the plurality of first vertical pass transistors.

Semiconductor device including pass transistors

A semiconductor device includes a stack including a plurality of electrode layers which include a plurality of capacitor first electrode layers and a plurality of capacitor second electrode layers alternately stacked on a substrate and a plurality of dielectric layers which are disposed alternately with the plurality of electrode layers; a first conductive pillar passing through the stack and coupled to the plurality of capacitor first electrode layers; a second conductive pillar passing through the stack and coupled to the plurality of capacitor second electrode layers; and a plurality of insulation layer patterns insulating the first conductive pillar and the plurality of capacitor second electrode layers from each other and insulating the second conductive pillar and the plurality of capacitor first electrode layers from each other.

Semiconductor device including capacitors and manufacturing method thereof

A three-dimensional memory device and a manufacturing method thereof. The three-dimensional memory device includes an electrode structure including a plurality of electrode layers and a plurality of interlayer dielectric layers which are alternately stacked on a substrate; and a plurality of through holes passing through the electrode structure in a vertical direction, and including pad regions at the transition between portions of the through holes have different widths.

Three-dimensional memory device and manufacturing method thereof

A three-dimensional semiconductor device may comprise a first cell region, a second cell region, and a via plug region disposed between the first cell region and the second cell region; a word line stack disposed in the first cell region, the via plug region, and the second cell region, the word line stack including a plurality of word lines and a plurality of interlayer insulating layers which are alternately stacked; and a plurality of via plugs exclusively connected to the plurality of the word lines, respectively, by vertically penetrating through the word line stack in the via plug region. The via plugs may have an arrangement of a zigzag pattern in a row direction from a top view. The diameters of the via plugs may increase in the row direction.

A semiconductor device includes a first connection pattern; a bit line disposed over the first connection pattern in a vertical direction; and a bit-line contact pad, disposed in a first layer between the bit line and the first connection pattern to electrically couple the bit line to the first connection pattern, and formed as an island when viewed along the vertical direction. A predetermined number of the bit-line contact pads are spaced apart from each other by a predetermined distance in a first direction, when viewed along the vertical direction.

Semiconductor device

A substrate processing apparatus may include a vacuum chamber, a substrate supporting unit disposed at lower portion of an inside of the vacuum chamber, and an electric field forming unit forming an electric field inside the vacuum chamber. The electric field forming unit may include an upper electrode disposed at an upper portion of the inside of the vacuum chamber, a lower electrode disposed in the substrate supporting unit, and a middle electrode disposed between the upper electrode and the lower electrode.

Substrate processing apparatus having a middle electrode

A memory device includes a cell wafer including a memory cell array; and a peripheral wafer including a row control circuit, a column control circuit and a peripheral circuit which control the memory cell array, and stacked on and bonded to the cell wafer in a first direction. The peripheral wafer includes a first substrate having a first surface and a second surface which face away from each other in the first direction; a first logic structure disposed on the first surface of the first substrate, and including the row control circuit and the column control circuit; and a second logic structure disposed on the second surface of the first substrate, and including the peripheral circuit.

Memory device having vertical structure

A method for manufacturing a three-dimensional memory device comprises: forming a first pre-stack by alternately stacking a plurality of first interlayer dielectric layers and a plurality of first sacrificial layers in a vertical direction; forming, in the first pre-stack, a first staircase part; forming a plurality of first vertical vias, which pass through the first staircase part, and a plurality of second vertical vias that pass through a first coupling part of the first pre-stack; forming a second pre-stack by alternately stacking a plurality of second interlayer dielectric layers and a plurality of second sacrificial layers on the first pre-stack; forming, in the second pre-stack, a second staircase part; forming a plurality of third vertical vias and a plurality of fourth vertical vias; and replacing the first and second sacrificial layers with an electrode material.

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Cheongju-si, South Korea

Sung Lae Oh