Average Co-Inventor Count = 8.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (2 from 131,744 patents)
2 patents:
1. 9865474 - Etching method using plasma, and method of fabricating semiconductor device including the etching method
2. 9520301 - Etching method using plasma, and method of fabricating semiconductor device including the etching method