Corning Incorporated

Sung-jong Pyo

Philip Robert LeBlanc

Rajeshkannan Palanisamy

Uta-Barbara Goers

Correy Robert Ustanik

En Hong

Sung-chan Hwang

Ji Hwa Jung

Tae-ho Keem

Michal Mlejnek

Chong Pyung An

Johannes Moll

Hyeong-cheol Lee

Amanda Kathryn Thomas

A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.

Method and apparatus for inspecting defects on transparent substrate and method emitting incident light

A method of inspecting defects of a transparent substrate may include: illuminating a transparent substrate; calculating an incidence angle range of light so that a first region where the light meets a first surface of the transparent substrate and a second region where light meets a second surface being opposite the first surface of the transparent substrate do not overlap each other; adjusting an incidence angle according to the incidence angle range; adjusting a position of a first detector so that a first field-of-view of the first detector covers the first region and does not cover the second region; adjusting a position of a second detector so that a second field-of-view of the second detector covers the second region and does not cover the first region; and obtaining a first image of the first region and a second image of the second region from the first and second detector, respectively.

Method and apparatus for inspecting defects on transparent substrate

Growing community of inventors

Asan-si, South Korea

Sung-jong Pyo