Samsung Electronics Co., Ltd.

Sung-Ho Jo

Sun Jae Lee

Ki-Hwan Park

Jong Kook Song

Dong Wook Cho

Tae-Gun Kim

Woo-Koen Kim

Ki Hwan Park

Pyoung-Ho Lim

Mo Hyun Cho

Jong-Kook Song

Pyung Ho Lim

A leak sensor and a leak sensing system are provided. The leak sensor preferably includes a fluid sensing member that is capable of sensing and indicating the presence of a fluid leaked from a fluid storage or transport member. The leak sensor further preferably includes at least two wires communicating with the fluid sensing member. The wires are preferably configured to be short-circuited when they contact the fluid leaked from the fluid storage or transport member. An electrical signal corresponding to a leak sensor location can thereby be sent to a control terminal of the leak sensing system. A portion of the wires may be arranged in a cable coated with a protective material such as Teflon&#xae;. The control box (or terminal) preferably receives electrical signals from a plurality of leak sensors. The electrical signals can provide information on whether the fluid has leaked and on which leak sensor or sensors have detected the fluid leak.

Leak sensor and leak sensing system

A method for cleaning and drying semiconductor wafers improves device yield by providing more advanced control of the ratio of drying fluid to cleaning fluid, for example the ratio of N2 vapor to IPA vapor. In addition, a quick drain process is employed to improve process throughput, and to further improve particle and watermark removal during the cleaning and drying steps.

Method of rinsing and drying semiconductor substrates

Growing community of inventors

Gyeonggi-do, South Korea

Sung-Ho Jo