Korea Research Institute of Chemical Technology

Korea Institute of Energy Research

Ecopro Co. Ltd.

Sung Ho Cho

Yong Ki Park

Won Choon Choi

Na Young Kang

Young Cheol Park

Seung Yong Lee

Dal Hee Bae

Do Won Shun

Si Hyun Lee

Gyong Tae Jin

Ho Jung Ryu

Song-Jong Cho

Sung Jin Yoon

Min-Whee Cho

Young-Ju Son

Jae Hyeon Park

Chang Keun Yi

The present invention provides a catalyst for the decomposition of a perfluorinated compound containing a halogen acid gas, and a preparation method thereof. According to the present invention, the Ru&#x2014;P&#x2014;Al tri-component catalyst for the decomposition of a perfluorinated compound shows an excellent decomposition activity and durability with respect to the decomposition and removal of a perfluorinated compound containing a halogen acid gas, and thus can be used to decompose a chamber cleaning gas, an etchant, a solvent and the like of a perfluorinated compound from the semiconductor manufacturing industry to the LCD processing field. In addition, the present invention can be useful for decomposing and removing a perfluorinated compound discharged in a process using a halogen acid gas such as F, Cl, Brand the like.

Catalyst for decomposition of perfluorinated compound containing halogen acid gas, and preparation method thereof

An apparatus for drying particles in a fluidized state includes a particle input segment into which wet particles are input, a drying segment having a multi-perforated plate dividing an inner space of the drying segment into an upper section and a lower section, a plurality of upper partition plates partitioning the upper section and positioned above the multi-perforated plate, a plurality of lower partition plates in the lower section respectively corresponding to the plurality of upper partition plates, a plurality of pairs of channel plates in the lower section that pass through the multi-perforated plate such that each pair of the plurality of pairs of channel plates are respectively arranged on opposite sides of respective ones of the plurality of upper partition plates and on opposite sides of respective ones of the plurality of lower partition plates; and a heated-air flow supply segment for supplying hot gas to the drying segment.

Fluidized bed drying apparatus

Growing community of inventors

Daejeon, South Korea

Sung Ho Cho