Samsung Electro-mechanics Co., Ltd.

Sung Cheon Jung

Yoon Shik Hong

Jung Hyun Lee

Hyun Kee Lee

Sang Kee Yoon

Joon Seok Kang

Hyun Suk Lee

Suk Kee Hong

Young Gyu Lee

Jin Ki Min

Young Yun Kim

Yong San Shin

Jong Hyun Lee

An MEMS variable optical attenuator includes a substrate having a planar surface, a micro-electric actuator arranged on the planar surface of the substrate, a pair of coaxially aligned optical waveguides having a receiving end and a transmitting end, respectively, and an optical shutter movable to a predetermined position between the receiving end and the transmitting end of the optical waveguides, and driven by the micro-electric actuator. A surface layer is formed on the optical shutter, has reflectivity less than 80% so as to allow incident light beams to partially transmit thereinto, and further has a sufficient light extinction ratio, thereby extinguishing the partially transmitted light beams therein.

Microelectromechanical systems (MEMS) variable optical attenuator

Disclosed is herein an optical switch, which has advantages of an MEMS optical switch and a waveguide optical switch including a small electric power consumption, an easy packaging process, and a fast switching speed. The optical switch includes an input waveguide connected to an input optical fiber through which an optical signal is inputted, and a plurality of output waveguides connected to a plurality of output optical fibers through which the optical signal is outputted. An actuator is positioned between the input waveguide and the output waveguides, and has an MEMS structure including a fixed part and a moving part connected to the fixed part by a spring to move by a predetermined force. Additionally, a plurality of moving waveguides are assembled with the moving part of the actuator and move in the same direction as the movement of the moving part in such a way that first ends of the moving waveguides correspond in position to the input waveguide, and second ends of the moving waveguides correspond in position to the output waveguides.

Optical switch and method of producing the same

Disclosed is an MEMS variable optical attenuator comprising a substrate having a planar surface, optical fibers having an optical signal transmitting end and an optical signal receiving end, respectively, coaxially arranged on the substrate, a micro-electric actuator arranged on the substrate for providing a driving stroke along a direction perpendicular to an optical axis of the optical beam, at least one lever structure arranged on the substrate for receiving the driving stroke of the micro-electric actuator at a first end thereof and transferring an amplified displacement distance to an optical shutter through a second end thereof, an optical shutter arranged on the substrate and connected to the second end of the lever structure so as to be moved by the amplified displacement distance, thereby being displaced to an attenuation position of the optical beam.

Microelectromechanical system (MEMS) variable optical attenuator

A dicing method for a micro electro mechanical system chip, in which a high yield and productivity of chips can be accomplished, resulting from preventing damage to microstructures during a dicing process by using a protective mask. The dicing method for a micro electro mechanical system chip, comprising the steps of designing a grid line and wafer pattern on a chip-scale on the non-adhesive surface of a transparent tape as a protective mask (first step); sticking microstructure-protecting membranes on the adhesive surface of the transparent tape (second step); putting the transparent tape on the whole surface of a wafer in a state wherein the grid line designed on the non-adhesive surface of the transparent tape is matched to the dicing line of the wafer (third step); cutting the transparent tape to a size larger than the wafer, mounting the wafer on a guide ring and dicing the wafer (fourth step); and separating the transparent tape from diced chips (fifth step).

Dicing method for micro electro mechnical system chip

Disclosed is a MEMS (Micro Electro Mechanical System) variable optical attenuator. The MEMS variable optical attenuator comprises a substrate having a flat upper surface; an electrostatic attenuator disposed on the upper surface of the substrate; transmitting and receiving terminals disposed on the substrate so that optical axes of the terminals coincide with each other; and a beam shutter moved to a designated position between the transmitting and receiving terminals by the actuator, wherein the beam shutter is provided with a first coating layer made of a material with a reflectivity of more than 90% and formed on a surface of the beam shutter, and a second coating layer made of a material with a reflectivity of less than 80% so that a part of light is transmitted by the second coating layer and with a photodisintegration rate of the transmitted light determined by a thickness of the second coating layer.

MEMS variable optical attenuator

Disclosed is a variable optical attenuator comprising: a transmitting fiber for transmitting light; a receiving fiber concentrically placed with said transmitting fiber for absorbing light; a shutter between said transmitting fiber and said receiving fiber for absorbing light to adjust optical transmittance; and an actuator for driving said shutter. The size and price of the optical attenuator is remarkably reduced compared to a conventional mechanical connector-type attenuator to provide an article excellent in competitive edge.

Variable optical attenuator

Disclosed is a path-converted variable optical attenuator comprising: a transmitting fiber for launching an optical signal through a transmitting core; a receiving fiber for receiving the optical signal from the transmitting fiber through a receiving core; and a mirror having a reflector for obstructing the optical signal launched from the transmitting core of the transmitting fiber from proceeding into the receiving core of the receiving fiber, and being displaced in a direction allowing a portion of the optical signal of the transmitting fiber into the receiving fiber to attenuate the optical signal. An optical signal launched from the transmitting fiber to the receiving fiber is reflected to a separate path from paths of transmitting/receiving fibers so that attenuation may not vary according to wavelength.

Variable optical attenuator of optical path conversion

Disclosed herein is an optical switch. The optical switch includes an electrostatic actuator and a substrate. The electrostatic actuator includes an electrostatic actuator, the electrostatic actuator comprising, a reciprocating mass located in the center of the electrostatic actuator, first rotating axes located symmetrically at the left and right sides of the reciprocating mass, first rotating masses rotatably connected to the first rotating axes, first rotating springs for supporting the first rotating masses, linear springs connected to the first rotating masses, second rotating masses connected to the linear springs, second rotating springs for supporting the second rotating masses, second rotating axes connected to the second rotating masses, structural anchors at the side ends of the actuator, drive electrodes, and a micro mirror movable by the same displacement as the reciprocating mass.

Optical switch

A variable optical attenuator to provide a new drive mechanism for an actuator, whereby the amount of attenuation does not increase in geometric progression as voltage increases, and an exceptional resolution effect is achieved. The variable optical attenuator comprises a transmission fiber for transmitting beams of light, a reception fiber arranged on the same axis with the transmission fiber and receiving the light beams transmitted by the transmission fiber, a variable shutter arranged between the transmission and reception fibers, and moving vertically to cut off or transmit the light beams, thereby controlling an amount of attenuation, the variable shutter cutting off the light to have a maximum amount of attenuation at an initial position, a comb actuator for driving the variable shutter, and a spring for generating a spring force to return the variable shutter to its initial position, the spring force not being applied in the initial position having the maximum amount of attenuation when a drive voltage of the comb actuator is not applied, and spring force being applied when the variable shutter is driven.

A brushless DC motor is disclosed. In the motor, an axial vibration limit unit is provided on a bearing and electromagnetically attracts a rotor, thus preventing the rotor from being centrifugally lifted during a high speed rotation of the rotor. In the operation of the motor, an axial displacement of the rotor is sensed by an induction coil of a sensor. The induction coil generates a variable induction current indicative of an axial displacement of the rotor, and outputs the current to a controller through an amplifier, thus controlling the vibration limit unit. The electromagnetic bearing of this invention thus supports the shaft and rotor in an axial direction and almost completely prevents any axial vibrations of the rotor, thereby reducing operational vibrations and noises and improving the axial dynamic characteristics of the brushless DC motor.

Brushless DC motor

A brushless DC motor for a disc drive having a base and a coil-wound stator secured to an upper portion of the base. One or more first stoppers are secured to the stator and a shaft is rotatably secured in a bearing forcibly inserted in a bore in the upper portion of the base. A hub of a rotor is secured to the shaft and a cylindrical wall extends downwardly at the rim of the hub and carries a magnet facing the stator with an air gap therebetween. A second stopper is secured to the rotor, to face the first stopper to retain the rotor in the axial direction. The second stopper has a flange over which the first stopper is placed with slight clearance. An elastomer rests on the first stopper and carries guides which extend in slots in the rotor to engage and center a hole in a disc.

Disc drive motor with means to center a disc and limit its axial movement

A bearing system for brushless DC motors is disclosed. The bearing system has an electromagnetic force generator in a bearing so as to generate an electromagnetic force or a magnetic force. The bearing system thus magnetically attracts the shaft when eccentricity of the shaft in the bearing is reduced during a high speed operation of the shaft, thus allowing the shaft to keep desired eccentricity in the bearing and increasing dynamic pressure of oil in the bearing and preventing a formation of an oil whirl, and improving dynamic characteristics of the motor such as low operational vibrations and noises during a high speed operation of the motor.

Growing community of inventors

Kyungki-do, South Korea

Sung Cheon Jung