Other

Tokyo Electron Limited

Toshiba Ceramics Co., Ltd.

Sunao Seko

Takanori Saito

Tomio Konn

Tomohiro Nagata

Ken Nakao

Eiichi Toya

Norihiko Saito

Kazutoshi Miura

Harunari Hasegawa

George Hoshi

Hiroyuki Honma

Hideyuki Yokoyama

Katsutoshi Ishi

Hiroshi Mori

Akira Otsu

Masakazu Kobayashi

Katsutoshi Ishii

Toshiyuki Makiya

Hisaei Osanai

Joji Hoshi

A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2&#xd7;10g/cmor less.

Carbon wire heating object sealing heater and fluid heating apparatus using the same heater

A heater sealed with carbon wire heating element has a carbon wire heating element sealed with a quartz glass member, the carbon wire being prepared by knitting carbon single fibers into a knitted cord of a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and crystallite size Lc (002) thereof being 4.0 nm or more.

Heater sealed with carbon wire heating element

The fluid heating apparatus, in accordance with the present invention, developed to solve the technological problems described above is characterized by comprising at least a heating tube heating fluid to be supplied from fluid supply source, a heater section spirally formed on an outer periphery of the heating tube and a housing accommodating the heating tube and the heater section, wherein the heater section comprises a carbon wire heating element and a quartz glass tube in which the carbon wire heating element is enclosed.

Fluid heating apparatus

A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.

Sealing terminal

Growing community of inventors

Nishiokitama-gun, Japan

Sunao Seko