Hitachi, Ltd.

Sumio Yamaguchi

Kunio Harada

Hideki Kambara

Masao Kamahori

Sukeyoshi Tsunekawa

Naoyuki Tamura

Sumio Okuno

Muneo Mizumoto

Kazuo Sato

Hiroshi Kanda

Isao Ishikawa

Yuzuru Ohji

Takao Kuroda

Shinjiro Ueda

Hideaki Kamohara

Shigeo Kato

Kazumasa Fujioka

Akio Inada

Yasuhide Matsumura

Kenichi Kawasumi

The present invention provides a method for producing a high-quality capillary tube used in an electrophoresis apparatus in a safe and inexpensive manner. A polymer coating on a capillary tube is converted into gas and removed through an oxidative reaction with oxygen radicals resulting from ozone decomposition, thereby providing tapered polymer coating. The material of the polymer may be polyimide.

Removal method for coating of polymer coated glass capillary tubing and polymer coated glass capillary tubing

The present invention provides a method for producing a high-quality capillary tube used in an electrophoresis apparatus in a safe and inexpensive manner. A polymer coating on a capillary tube is converted into gas and removed through an oxidative reaction with oxygen radicals resulting from ozone decomposition.

In a surface treatment apparatus, an organic substance is removed through ashing by ultraviolet rays and ozone at atmospheric pressure. A transparent partition plate is provided in closely spaced, opposed relation to a material to be treated, and at least one gas outlet is open to that surface of the partition plate opposed to the material to be treated. With this arrangement, the gas can be directly collected via the gas outlet during the treatment, and the end point of the organic substance removal treatment can be detected by analyzing the collected gas.

Surface treatment apparatus

A rotary substrate holder of a molecular beam epitaxy apparatus including leads-cum-posts serving both as leads for passing a current to a heater for heating a substrate and as posts for supporting the heater. By this arrangement, heat transferred from the heater to a bearing disposed in the vicinity of the heater is minimized in amount, thereby prolonging the service life of the holder and minimizing a heat loss thereof.

Rotary substrate holder of molecular beam epitaxy apparatus

In an acoustic microscope wherein an acoustic wave is projected to a predetermined specimen by an acoustic lens, and a disturbed acoustic wave from the specimen is imaged; an acoustic microscope characterized in that the lens has a ring which is arranged around it, whereby a liquid to serve as an acoustic propagation medium is held between the ring and the specimen by capillarity.

Acoustic microscope

An apparatus for molecular beam epitaxy according to the present invention is so constructed that a substrate is introduced into a vacuum vessel with a substrate surface for epitaxial growth facing in the direction of gravity, and that the substrate is conveyed to and transferred into vacuum chambers for performing processes necessary for the epitaxial growth, with the substrate surface maintained in the direction of gravity and without directly touching the substrate surface.

Apparatus for molecular beam epitaxy

Growing community of inventors

Hamura, Japan

Sumio Yamaguchi