Pivotal Systems Corporation

Agni Corporation (cayman Islands)

Sumer Johal

Georges J Gorin

John J McNamara

Barton Lane

Pauravi Shah

Sylvia G J P Spruytte

Nicholas Carlin

Herve C Kieffel

A composition of biomass material is disclosed. The composition includes: (i) a lignocellulosic material; and (ii) at least one member selected from a group consisting of potassium, sodium and chlorides, wherein said at least one member comprising not more than about 0.01% (by weight) of said composition. The composition may not include more than 10% of water.

Systems, methods and compositions relating to combustible biomaterials

A method for controlling the plasma etching of semiconductor wafers determines the impedance of a plasma chamber using values representing voltage, current, and the phase angle between them, as provided by a sensor. All or less than all of the data during a first time period may be used to calculate a model. During a second time period, real time data is used to calculate a version of the instant impedance of the chamber. This version of impendence is compared to a time-projected version of the model. The method determines that etching should be stopped when the received data deviates from the extrapolated model by a certain amount. In some embodiments a rolling average is used in the second time period, the rolling average compared to the model to determine the end point condition.

End point detection method for plasma etching of semiconductor wafers with low exposed area

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Walnut Creek, CA, United States of America

Sumer Johal