Samsung Display Co., Ltd.

Amazon Technologies, Inc.

Suk-Won Jung

Myung-Soo Huh

Choel-Min Jang

Jin-Kwang Kim

Jae-Hyun Kim

Sung-Hoon Yang

Sung-Chul Kim

In-Kyo Kim

Kyung-Sook Jeon

Sang-Youn Han

Mi-Seon Seo

Seung-Mi Seo

Sung-Hun Key

Seung-Yong Song

Ki-Hun Jeong

Jung-Suk Bang

Byeong-Hoon Cho

Seung-Ho Choi

Jeong-Ho Yi

Cheol-Min Jang

Yong-Suk Lee

Cheol-Lae Roh

Woong-Kwon Kim

Dae-Cheol Kim

Sang-Hyuk Hong

Kun-Wook Han

Seung Mi Seo

Sung-Joong Joo

Dong-Kwon Kim

Chang-Woo Shim

Hyun-Keun Song

Dong-Hoon Lee

Choong-Ho Lee

Chang-Oh Jeong

Tae-Wook Kang

Hyang-Shik Kong

Do-Hyun Kim

Jun-Ho Song

Seung-Ha Choi

Kyung Tea Park

Joo-han Kim

Young-Mook Choi

Kyoung-Jae Chung

Yoon-Chan Oh

Cheol-Rae Jo

Jung-Soo Rhee

Kang-Il Lee

Mi-Ra An

Sung-Yong Lee

Hui-Sung Lee

Provided is a vapor deposition apparatus including a first injection unit injecting a first raw gas in a first direction and a first filter unit mounted on the first injection unit. The first filter unit includes a plurality of plates separated from one another in the first direction and disposed in parallel to one another, each of the plurality of plates having holes therein, being detachably coupled with the first filter unit, and having the holes with sizes of horizontal cross-sections gradually increasing in a direction in which the first raw gas moves. Accordingly, a process efficiency of the vapor deposition apparatus may be enhanced.

Vapor deposition apparatus

A vapor deposition apparatus for providing a deposition film on a substrate, the vapor deposition apparatus includes a plurality of first nozzle parts which injects a first raw material toward the substrate; a plurality of second nozzle parts which is alternately disposed together with the plurality of first nozzle parts and injects a second raw material toward the substrate; a diffuser unit which distributes the second raw material to the plurality of second nozzle parts; and a supply unit which supplies the second raw material to the diffuser unit.

Provided is a vapor deposition apparatus including: a plasma generator configured to change at least a portion of a first raw material gas into a radical form; a corresponding surface corresponding to the plasma generator; a reaction space between the plasma generator and the corresponding surface; and an insulating member separated from, and surrounding the plasma generator.

Vapor deposition apparatus, deposition method, and method of manufacturing organic light-emitting display apparatus by using the same

A vapor deposition apparatus for forming a deposition layer on a substrate, the vapor deposition apparatus includes a supply unit configured to receive a first source gas, a reaction space connected to the supply unit, a plasma generator in the reaction space, a first injection unit configured to inject a deposition source material to the substrate, the deposition source material including the first source gas, and a filament unit in the reaction space, the filament unit being connected to a power source.

A vapor deposition apparatus in which a deposition process is performed by moving a substrate, the vapor deposition apparatus including a supply unit that injects at least one raw material gas towards the substrate, and a blocking gas flow generation unit that is disposed corresponding to the supply unit and generates a gas-flow that blocks a flow of the raw material gas.

Vapor deposition apparatus including a blocking gas flow generation unit

A monomer vaporizing device and a method of controlling the same are disclosed. The monomer vaporizing device includes: a first vaporizer and a second vaporizer that receive a purge gas and vaporize a first monomer and a second monomer, respectively; a first flow pipe and a second flow pipe that are connected to the respective vaporizers and allow the first monomer and the second monomer, vaporized by the respective vaporizers, to flow therethrough; a transition tube that is connected to the first flow pipe and the second flow pipe and supplies at least one of the first monomer and the second monomer to a deposition chamber; and a control valve apparatus that regulates monomer flow into the deposition chamber. The device facilitates smooth and uninterrupted application of monomer to the interior of a deposition chamber.

Monomer vaporizing device and method of controlling the same

A deposition apparatus for performing a deposition process by using a mask with respect to a substrate, the deposition apparatus includes a chamber, a support unit in the chamber, the support unit including first holes and being configured to support the substrate, a supply unit configured to supply at least one deposition raw material toward the substrate, and movable alignment units through the first holes of the support unit, the alignment units being configured to support the mask and to align the mask with respect to the substrate.

Deposition apparatus

Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus

An electrowetting display device and manufacturing method thereof. The manufacturing method comprises forming pixel electrodes on a substrate, forming an insulation layer on the pixel electrodes, applying light through a mask to expose portions of the insulation layer, developing the insulation layer to at least partially remove the exposed portions of the insulation layer, wherein the developing forms a water repellent layer on the pixel electrodes and partitioning walls on the water repellent layer, and forming an oil layer between the partitioning walls and on the water repellent layer. The water repellent layer and the sides of the partitioning walls are hydrophobic. Upper surfaces of the partitioning walls are hydrophilic. The partition walls are thicker than the water repellent layer.

Electrowetting display device and manufacturing method thereof

In a display substrate, a method for manufacturing the display substrate and an electro-wetting display apparatus including the display substrate, the display substrate includes a base substrate, a sidewall defining a unit pixel area, a pixel electrode, a hydrophobic insulating layer and a light blocking layer. The sidewall is on the base substrate and defines the unit pixel area. The pixel electrode is in the unit pixel area. The hydrophobic insulating layer is on the sidewall and the pixel electrode. The light blocking layer is on the hydrophobic insulating layer and overlaps the sidewall.

Display substrate, method of manufacturing the same and electro-wetting display panel having the same

Deposition apparatus, method of forming thin film using the same and method of manufacturing organic light emitting display apparatus

A display substrate includes a pixel switching element, a pixel electrode, a reference line, a control switching element, a bias line, a light sensing element, a sensing capacitor and a light blocking filter pattern. The pixel switching element is connected to a data line and a gate line, includes a first semiconductor pattern. The pixel electrode is connected to the pixel switching element. The reference line is in parallel with the data line. The control switching element is connected to the reference line and the gate line, includes a second semiconductor pattern. The bias line is in parallel with the gate line. The light sensing element is connected to the bias line and the control switching element, includes a third semiconductor pattern. The sensing capacitor is connected to the light sensing element and a storage line. The light blocking filter pattern transmits a first light, and blocks a second light.

Display substrate, method of manufacturing the same and touch display apparatus having the same

A flat panel display device provides a sealing structure for comprising and sealing a display unit disposed in a first region on a substrate. The display unit includes the first region and a second region, and a barrier is disposed in the first region on the substrate, on an outer side of the display unit, and adjacent to the second region. The sealing structure contacts the barrier, and includes at least one first layer of an inorganic material and at least one second layer of an organic material. A method of manufacturing the flat panel display device is also disclosed.

Flat panel display device and manufacturing method thereof

A method of depositing a layer includes spraying a source gas and a reactant gas onto a substrate disposed on a susceptor unit using at least one source gas spray nozzle and at least one reactant gas nozzle to form a first source gas region and a first reactant gas region on the substrate, respectively, moving the susceptor unit by a distance corresponding to a width of the source gas spray nozzle or a width of the reactant gas spray nozzle in a first direction, and spraying the source gas and the reactant gas onto the first reactant gas region and the first source gas region using the source gas spray nozzle and the reactant gas nozzle, respectively, to form a first monolayer.

Method of depositing an atomic layer

A vapor deposition apparatus for depositing thin films on a substrate includes a supply unit including a plurality of linear supply members configured to supply at least one gas; and a nozzle unit including a plurality of nozzle members connected to the plurality of supply members and configured to supply the at least one gas toward the substrate, wherein two adjacent nozzle members of the plurality of nozzle members are connected to at least one common supply member of the plurality of supply members.

Vapor deposition apparatus, vapor deposition method and method of manufacturing organic light emitting display apparatus

Growing community of inventors

Yongin, South Korea

Suk-Won Jung