Samsung Electronics Co., Ltd.

Suk-koo Hong

Gum-hye Jeon

Jin-joo Kim

Jeong-ho Mun

Mi-yeong Kang

Kyoung-yong Cho

Hyo-sung Lee

Gun-woo Park

A photoacid generator (PAG) and a photoresist composition, the PAG being represented by the following Chemical Formula (I): 

Photoacid generator and photoresist composition including the same

Provided is a photoresist composition including a plasma light absorber and a method of manufacturing semiconductor devices using the same. The photoresist composition may include a developable polymer, a photoacid generator, a plasma light absorber, and an organic solvent. The plasma light absorber may be relatively transmissive to light used with a photolithographic patterning process (e.g., ultraviolet light) to pattern a layer formed with the photoresist composition and be relatively absorptive to light created in a subsequent etching process (such as light generated from a plasma). When forming a semiconductor device, a patterned photoresist layer may be more precisely generated and may better maintain is desired properties when used to etch various target layers of the semiconductor device.

Photoresist composition for deep ultraviolet light patterning method and method of manufacturing semiconductor device

Provided is a method of fabricating an integrated circuit device, the method including: forming, on a substrate, a developable bottom anti-reflective coating (DBARC) layer including a chemically amplified polymer; forming, on the DBARC layer, a photoresist layer including a non-chemically amplified resin and a photoacid generator (PAG); generating an acid from the PAG in a first region selected from the photoresist layer, by exposing the first region; diffusing the acid in the exposed first region into a first DBARC region of the DBARC layer, the first DBARC region facing the first region; and removing the first region and the first DBARC region by developing the photoresist layer and the DBARC layer.

Method of fabricating integrated circuit devices

Growing community of inventors

Suwon-si, South Korea

Suk-koo Hong