Samsung Electronics Co., Ltd.

Suk-Hee Jang

Kyoung-woo Lee

Young-Bae Kim

Jeong-Hoon Ahn

Hyeok-Sang Oh

Jun-Jung Kim

Jin-Hyeung Park

Hyo-Seon Lee

A wiring structure includes a substrate, a lower insulation layer on the substrate, a lower wiring in the lower insulation layer, a first etch-stop layer covering the lower wiring and including a metallic dielectric material, a second etch-stop layer on the first etch-stop layer and the lower insulation layer, an insulating interlayer on the second etch-stop layer, and a conductive pattern extending through the insulating interlayer, the second etch-stop layer and the first etch-stop layer and electrically connected to the lower wiring.

Wiring structures and semiconductor devices

Growing community of inventors

Suwon-si, South Korea

Suk-Hee Jang