Samsung Electronics Co., Ltd.

Suk-chan Lee

Byung-gon Kim

Myeon-soon Hwang

Hong-suk Sun

Myoung-Woon Kim

Jung-wook Kim

Sang-wook Yoo

Do-young Kam

Kyu-hee Han

Tai-hwan Park

Jin-hyuk Choi

A gas supplying apparatus for supplying deposition gas onto a substrate surface, the gas supplying apparatus comprising: a gas supplying ring with one or more gas supplying channels formed along the interior of the gas supplying ring and with a plurality of gas distribution channels directed toward a center of the gas supplying ring; and a plurality of adapters with gas nozzles connecting to the gas distribution channels, respectively, that detachably connect to the interior of the gas supplying ring, wherein the gas nozzles have a variety of injection configurations.

Gas supplying apparatus

A reaction apparatus including: a main body having a reaction chamber with an upper opening thereof, a lid hinge, and a lid combined to the lid hinge, rotationally opening and closing the upper opening; a lifting member having a first end part separated from a rotation axis of the lid and rotatably combined with the lid, and a second end part rotatably combined to the main body, that moves in opening and closing directions; and a driver activating the lifting member. With this configuration, the present invention provides a reaction apparatus, with a lid that is opened and closed readily, and in which the lid parallelly contacts a sealing member, and thereby creating a vacuum in the reaction chamber with ease.

Reaction apparatus

An apparatus for manufacturing a collimator by attaching a glass tube assembly, which includes a pigtail having a fiber, and a GRIN lens, which is coaxially arranged with the pigtail, into a metal sleeve having a tube shape. The apparatus includes a supporting part, a sleeve grip part connected to the supporting part and having at least one holder for disposing the metal sleeve therein, a fiber chucking part provided above the sleeve grip part and chucking the fiber, and a lift unit lifting and lowering the fiber chucking part to control the glass tube assembly inserted in the metal sleeve to move up and down along a longitudinal direction of the metal sleeve. With this configuration, the glass tube assembly is conveniently fixedly fitted into the metal sleeve.

Apparatus for manufacturing collimator

An apparatus for inspecting a collimator including a pigtail formed with first and second fibers, a GRIN lens disposed coaxially relative to the pigtail, and a glass tube supporting the pigtail and the GRIN lens in a single unit, to inspect optical properties of the collimator, comprising an inspection table; a gripping part, which is provided on the inspection table, gripping the collimator subject to inspection; a light supplying part transmitting a predetermined optical signal to the first fiber; a light receiving part, which is connected to the second fiber, receiving an optical signal returned from the second fiber, entering the first fiber; a measuring part calculating a value of the predetermined optical signal, which entered the first fiber, and a value of the optical signal, which returned from the second fiber; and an image displaying part displaying the value obtained from the measuring part. With this configuration, the collimator can be inspected in part, thereby increasing the product reliability of the collimator.

Apparatus for inspecting collimator

An apparatus for inspecting a collimator including a pigtail to which a fiber is connected to transmit an optical signal, a GRIN lens coaxially arranged with the pigtail, a glass tube accommodating and supporting the pigtail and the GRIN lens, and a metal sleeve protecting the glass tube, comprising an inspection table; a grip part provided on the inspection table, and gripping the collimator to be inspected; a first camera provided over the grip part having an axis perpendicular to a length of the collimator, and photographing the collimator along the length of the collimator; a second camera arranged coaxially with the collimator on the inspection table, and photographing the collimator perpendicular to an axis of the collimator; and a displaying part connected to the first and second camera, and displaying pictures transmitted from the first and second cameras. With this configuration, an apparatus for inspecting a collimator, which can effectively inspect the collimator, is provided, thereby increasing the reliability of the collimator.

Growing community of inventors

Suwon, South Korea

Suk-chan Lee