Samsung Electronics Co., Ltd.

Suhwan Lim

Jaehun Jung

Taehun Kim

Sanghoon Kim

Changhee Lee

Hanvit Yang

Seongchan Lee

Nambin Kim

Samki Kim

Hyeongwon Choi

Hyeyoung Kwon

A semiconductor device includes a lower structure including a semiconductor substrate and circuit devices on the semiconductor substrate; a stack structure including interlayer insulating layers and gate electrodes alternating in a vertical direction; and a channel structure penetrating the stack structure. The channel structure includes a core insulating layer, a channel layer, a gate dielectric layer, and a channel pad. A portion of the channel pad overlaps an uppermost gate electrode among the gate electrodes in a horizontal direction. The channel pad includes a first pad layer and a second pad layer on the first pad layer. The second pad layer includes doped polysilicon that is doped with impurities and having N-type conductivity. The first pad layer includes at least one of an undoped polysilicon region and a doped polysilicon region having N-type conductivity and having an impurity concentration lower than an impurity concentration of the second pad layer.

Semiconductor devices and data storage systems including the same

A semiconductor device includes a substrate, a stack structure including interlayer insulating layers and gate electrodes alternately and repeatedly stacked on the substrate in a first direction perpendicular, a channel structure that penetrates the stack structure, a contact plug disposed on the channel structure, and a bit line on the contact plug. The channel structure includes a core pattern, a pad structure on the core pattern, and a channel layer on a side surface of the core pattern and a side surface of the pad structure. The pad structure includes a pad pattern, a first pad layer, and a second pad layer, the first pad layer that is between the channel layer and the pad pattern, and the second pad layer including a first portion between the channel layer and the first pad layer, and a second portion between the first pad layer and the core pattern.

Semiconductor device

A semiconductor device includes gate electrodes and insulating layers spaced apart from each other on a substrate and alternately stacked in a direction perpendicular to an upper surface of the substrate, and channel structures that extend through stack structures. Ones of the structures include a channel insulating layer, a pad layer on the channel insulating layer, and a channel layer. The channel layer includes a first channel region, and a second channel region including a semiconductor material having a length shorter than a length of the first channel region and having an impurity concentration of a first conductivity type and the pad layer includes a semiconductor material doped with a second conductivity type impurity. A height level of a lower surface of the second channel region is lower than a height level of a lower surface of a first erase gate electrode.

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Hanam-si, South Korea

Suhwan Lim