Hitachi Global Storage Technologies Netherlands B.v.

Hgst Netherlands, B.v.

Hitachi Global Storage Technologies

Sue Siyang Zhang

Yi Zheng

Aron Pentek

Ming Jiang

Hung-Chin Guthrie

Wen-Chien David Hsiao

Vladimir Nikitin

Edward Hin Pong Lee

Quang Le

Yinshi Liu

Ning Shi

Daniel Wayne Bedell

Richard Hsiao

Yimin Hsu

Patrick Rush Webb

Amanda Baer

James Devereaux Jarratt

Yunxiao Gao

Yong Shen

Michael R Feldbaum

John Jaekoyun Yang

Prabodh Ratnaparkhi

Son Van Nguyen

Kim Yang Lee

Neil Leslie Robertson

Liubo Hong

Brian Rodrick York

Jordan Asher Katine

Wipul Jayasekara

Changqing Shi

Jui-lung Li

Douglas Johnson Werner

Jyh-Shuey Jerry Lo

Hamid Balamane

Tsung Yuan Chen

David Patrick Druist

Honglin Zhu

Nian Xiang Sun

Donald Giles Allen

Guomin Mao

Christian Rene Bonhote

Andrew Chiu

Katalin Pentek

Hieu Lam

Yuming Zhou

Vijay Prakash Singh Rawat

Kyusik Shin

Kanaiyalal Patel

Shiwen Huang

Michael Ming Hsiang Yang

Qiping Zhong

Xiaoyu Xu

Thomas William Clinton

Jian-Huei Feng

Edward H P Lee

Christopher William Bergevin

Thomas J A Roucoux

Xhavin Sinha

Yvette Chung Nga Winton

Jennifer Ai-Ming Loo

Wipul Pemsiri Jayaekara

Elizabeth Ann Brinkman

Valeri Synogatch

Thomas Dudley Boon, Jr

Alan J Tam

The present invention generally relates to a method for forming a smooth gap of a damascene write pole. An opening having a side wall with a first angle with respect to vertical is formed in a fill layer, and a first non-magnetic layer is deposited into the opening by ion beam deposition. The ion beam is delivered to the side wall at a second angle with respect to vertical. The ratio of the first angle to the second angle ranges from about 250 to about 3.5.

Method for producing a smooth Ru side gap of a damascene writer pole

The embodiments of the present invention generally relate to a method for forming a trench in which a write pole is deposited therein. The trench is formed with a single mask and multiple reactive ion etching (RIE) processes and has substantially straight side walls and a consistent bevel angle along the length of the write pole. The consistent bevel angle along the length of the write pole allows the bevel angle at the ABS to be consistent regardless of where the cut is when defining the ABS.

Method for forming a magnetic head for perpendicular magnetic recording

A method of forming a wave guide for a heat assisted magnetic recording slider of a disk drive includes depositing a layer of waveguide material onto a substrate, and depositing a layer of a hard mask material onto the waveguide material. The method then includes depositing a layer of photoresist onto the hard mask material, and exposing the photoresist to produce a hard mask pattern that includes a waveguide pattern. The method also includes stripping the photoresist material leaving the hard mask pattern having a first line edge roughness. The method also includes removing the waveguide material not covered by the hard mask, the waveguide having sidewalls which having a line edge roughness which is substantially equal to the first line edge roughness. Also disclosed is an apparatus for accomplishing the method.

Method and apparatus for magnetic recording head having a waveguide

A method for manufacturing a magnetic write head that has improved write poled uniformity and bevel angle control. The method uses a damascene process to form the write pole, wherein a trench is formed in a RIEable fill layer, and an adhesion layer is located only in areas outside of the trench. A seed layer is deposited into the trench, followed by a non-magnetic gap layer followed by electroplating of a magnetic material. A chemical mechanical polishing process is then performed, thereby forming a magnetic write pole within the trench. The adhesion layer located outside of the trench prevents de-lamination during the chemical mechanical polishing. However, not having any adhesion layer in the trench prevent oxidation related waviness or other deformation of the sides of the write pole.

Method for manufacturing a magnetic write pole with a consistent bevel angle

In one embodiment, a magnetic head includes a main pole having a trapezoidal cross-section at a media-facing surface thereof and a flared shape with a greater width in a cross-track direction at positions away from the media-facing surface, a leading shield positioned near a leading side of the main pole, wherein a leading gap is provided between the main pole and the leading shield, side shields positioned on both sides of the main pole in the cross-track direction adjacent the media-facing surface of the main pole, with side gaps provided between the main pole and both of the side shields, and a trailing gap provided on a trailing side of the main pole at the media-facing surface thereof, with a throat height of the side shields being less than the throat height of the side shields at a position closer to the trailing gap than the leading gap.

Tapered leading and side shields for use in a perpendicular magnetic recording head

Embodiments provide a slanted bump magnetic shield in a perpendicular write head. The slanted bump magnetic shield provides a small throat height to maximize magnetic flux for writing to a magnetic media such as a magnetic storage disk in a hard disk drive, while avoiding saturation.

Slanted bump design for magnetic shields in perpendicular write heads and method of making same

A method for manufacturing a magnetic write pole of a magnetic write head for perpendicular magnetic recording. A magnetic write pole material is deposited, followed by union milling hard mask, a polymer mask under-layer followed by a dielectric hard mask material, followed by a photoresist. The photoresist is patterned to define a write pole shape and the shape of the patterned photoresist is transferred onto the underlying dielectric hard mask by a novel reactive ion etching that is performed in a chemistry that includes one or more fluorine containing gases and He. The presence of He in the reactive ion etching tool helps to improve the profile of the patterned dielectric hard mask. In addition, RIE parameters such a gas ratio (e.g. CF4 to CHF3 gas ratio) and power ratio (e.g. source power to bias power) are adjusted to optimize the profile of the patterned dielectric mask.

Method for manufacturing a magnetic write pole of a perpendicular magnetic write head using novel mask fabrication

A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole using a mask that includes a hard mask layer deposited over the write pole laminate material, and a thick, physically robust image transfer layer. The image transfer layer can be a material such as AlTiO that can be patterned by a reactive ion etching process, but which also resists deformation during processing. This process allows a write pole and wrap-around trailing shield to be constructed at very narrow track widths without the mask deformation and fencing problems experienced by prior art methods.

Fenceless main pole definition for advanced perpendicular magnetic write head

A magnetic write head for perpendicular magnetic data recording. The write head includes a substrate and a magnetic write pole formed on the substrate, the write pole having a trailing edge and first and second sides. A magnetic stitched pole is formed over a portion of the magnetic write pole, the stitched pole having a front edge that defines a secondary flare point. First and second non-magnetic side walls are formed at the first and second sides of the write pole. The non-magnetic side walls extend from the substrate at least to the trailing edge of the write pole in a first region near an air bearing surface and wherein the first and second non-magnetic side walls extend from the substrate to a point between the substrate and the trailing edge, allowing the stitched magnetic pole to extend partially over the sides of the write pole.

Perpendicular magnetic write head having a novel shield structure

Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

Magnetic head with flared write pole having multiple tapered regions

A method for forming a magnetic write head having a trailing shield with a tapered and stepped, self aligned trailing magnetic shield. The shield has a tapered portion that tapers away from the write pole as it extends away from the ABS. This tapered portion helps to channel flux to the pole tip portion of the shield, while preventing the loss of write field to the shield. The stepped portion of the shield further helps to prevent the loss of write field and also defines a secondary throat height of the shield that can be accurately located relative to the air bearing surface.

Magnetic write head having a self-aligned side wrap-around shield with multi-angle slanted bump

In one embodiment and method of the present invention, a coil of a write head is created by forming a Ppedestal layer and a back gap layer and further forming a coil pattern consistent with the coil to be formed and insulator spacers dispersed in the coil pattern, using a non-damascene process, thereafter the coil is formed by plating using a damascene process.

Process of manufacturing low resistance damascene coils

A method for manufacturing a magnetic write head having a write pole with a very narrow track width, straight well defined sides and a well defined trailing edge width (e.g. track-width). The method includes uses two separate chemical mechanical polishing processes that stop at separate CMP stop layers. The first CMP stop layer is deposited directly over a RIEable fill layer. A RIE mask, is formed over the fill layer and first CMP stop layer, the RIE mask having an opening. A trench then is formed in the RIEable fill layer. A second CMP stop layer is then deposited into the trench and over the RIE mask, followed by plating of a magnetic material. First and second chemical mechanical polishing processes are then performed, the first stopping at the first CMP stop and the second stopping at the second CMP stop.

Method for manufacturing a magnetic write pole having straight side walls and a well defined track-width

A method for manufacturing a magnetic write head having a write pole with a tapered trailing edge step. The resulting tapered trailing edge step maximizes write field at very small bit sizes by preventing the magnetic saturation of the write pole at the pole tip. The method includes depositing a magnetic write pole material and then depositing a magnetic material over the magnetic write pole material. A RIE mask and hard mask are deposited over the magnetic bump material. A resist mask is formed over the RIE mask and hard mask, and a reactive ion etching is performed to transfer the pattern of the resist mask onto the underlying hard mask. Then an ion milling is performed to form a the magnetic step layer with a tapered edge that defines a tapered trailing edge step structure of the write pole.

Method for manufacturing a magnetic write head having a hard mask defined write pole trailing edge step

A stepped main pole for a perpendicular write head and methods of making the stepped main pole. The stepped main pole has a main pole tip and a base portion. The main pole tip has a surface that forms part of the ABS and a first thickness. The base portion extends from the main pole tip and has a thickness that varies from the first thickness to a second thickness to form a slanted surface with an apex angle adjacent the main pole tip. By placing the base portion away from the ABS and providing a thickness that increases in a direction away from the ABS, the stepped pole can provide the necessary magnetic flux for writing, while avoiding undesired leakage and fringing. To form embodiments of the stepped main pole of the invention, a fluorine-based reactive ion etch (RIE) may be used. By using an RIE to define the stepped main pole, the apex angle can be better controlled and tight edge control can be achieved.

Stepped main pole for perpendicular write heads in hard disk drives and method of making same

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Saratoga, CA, United States of America

Sue Siyang Zhang