Samsung Electronics Co., Ltd.

Sue-Jin Cho

Won-Don Joo

Yu-sin Yang

Woo-seok Ko

Sang-kil Lee

Kwang-Soo Kim

Sang Don Jang

Byeong-hwan Jeon

Byeong Hwan Jeon

Min-Kook Kim

Hashimoto Kohei

Byeong-Hwan Jeon

Wook-Rae Kim

Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.

Light source device and semiconductor manufacturing apparatus including the same

An illumination optic system includes a convex mirror to reflect light from a light source to towards a lens. The light source is at a first focus position and the lens is at a second focus position of the mirror. The system also includes a reflector to reflect light not incident on the lens toward the convex mirror. The reflector has a light guide hole to guide light to the incidence surface of the lens.

Reflector structure of illumination optic system

A broadband light illuminator of an optical inspector for optically detecting defects of an inspection object may include an electrode-less chamber including a plasma area from which broadband light is generated; a first energy provider, exterior to the chamber, configured to provide first energy for ionizing high pressure gases to form ionized gases in the chamber; a second energy provider, exterior to the chamber, configured to provide second energy for transforming the ionized gases into a plasma state to form the plasma area at a central portion of the chamber; an elliptical reflector having a first focus at which the chamber is positioned and a second focus such that the broadband light is reflected from the elliptical reflector toward the second focus; and a lens unit focusing the reflected broadband light onto the inspection object to form an inspection light for detecting the defects of the inspection object.

Broadband light illuminators

Growing community of inventors

Yongin-si, South Korea

Sue-Jin Cho