Asml Netherlands B.v.

Sudhir Srivastava

Sjoerd Nicolaas Lambertus Donders

Simon Gijsbert Josephus Mathijssen

Erik Henricus Egidius Catharina Eummelen

Rogier Hendrikus Magdalena Cortie

Sander Bas Roobol

Petrus Wilhelmus Smorenburg

Nan Lin

Koen Cuypers

Gerrit Jacobus Hendrik Brussaard

Krijn Frederik Bustraan

Stef Marten Johan Janssens

Hendrikus Johannes Schellens

Theodorus Johannes Antonius Renckens

Adrianus Marinus Wouter Heeren

Bo Lenssen

Jeroen Gerard Gosen

A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the member relative to the opening, wherein the linkage mechanism comprises a frame attached to a wall and fixed at a first end in relation to the passageway, a portion of the frame moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the movable portion such that an expansion of the piezo actuator results in movement of the movable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the member.

Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus

Disclosed is a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radiation source, a pump radiation source is operable to emit pump radiation at a high harmonic generation gas medium thereby exciting the high harmonic generation gas medium within a pump radiation interaction region so as to generate the high harmonic radiation and an ionization radiation source is operable to emit ionization radiation at the high harmonic generation gas medium to ionize a gas at an ionization region between the pump radiation interaction region and an optical output of the illumination source.

Apparatus for delivering gas and illumination source for generating high harmonic radiation

Disclosed is gas delivery system which is suitable for a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radiation source, a gas delivery element delivers gas in a first direction. The gas delivery element has an optical input and an optical input, defining an optical path running in a second direction. The first direction is arranged relative to the second direction at an angle that is not perpendicular or parallel. Also disclosed is a gas delivery element having a gas jet shaping device, or a pair of gas delivery elements, one of which delivers a second gas, such that the gas jet shaping device or second gas is operable to modify a flow profile of the gas such that the number density of the gas falls sharply.

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Eindhoven, Netherlands

Sudhir Srivastava