Applied Materials, Inc.

Sudhir Goodhalekar

Dmitry Lubomirsky

Muhammad M Rasheed

Xinglong Chen

Tony Kaushal

Kadthala Ramaya Narendranath

A method and apparatus for providing a fluid distribution element for an electrostatic chuck that reduces plasma formation and arcing within heat transfer fluid passages. One embodiment comprises a plate and a dielectric component, where the dielectric component is inserted into the plate. The plate is adapted to be positioned within a channel to define a plenum, wherein the dielectric component provides at least a portion of a fluid passage coupled to the plenum. A porous dielectric layer, formed upon the dielectric component, provides at least another portion of a fluid passage coupled to the plenum. In other embodiments, the fluid distribution element comprises various arrangements of components to define a fluid passage that does not provide a line-of-sight path from the support surface for a substrate to a plenum.

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Fremont, CA, United States of America

Sudhir Goodhalekar