Kla Tencor Corporation

Nanomechanics, Inc.

Sudharshan Phani Pardhasaradhi

Warren C Oliver

Michael P Drake

Richard Anthony

Warren Oliver

A mechanical testing system having a frame, and a stage for holding a sample. An arm for pressing a tool against a surface of the sample. A primary actuator is connected to the frame and applies a primary force and drives the tool relative to the sample, thereby causing the frame to flex. A displacement sensor measures a displacement value comprised of two components, the first component including a distance traveled by the probe into the sample as the primary force is applied, and the second component including a measure of a degree of flex of the frame as the primary force is applied. A compensating actuator is connected to the frame and applies a compensating force that reduces the second component of the displacement value.

Compensated mechanical testing system

A heated or cooled sample holding stage for use in a nanoindentation measurement system is described. The geometry of the design and the selection of materials minimizes movement of a sample holder with respect to a nanoindentation tip over a wide range of temperatures. The system controls and minimizes motion of the sample holder due to the heating or cooling of the tip holder and/or the sample holder in a high temperature nanoindentation system. This is achieved by a combination of geometry, material selection and multiple sources and sinks of heat. The system is designed to control both the steady state and the transient displacement response.

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Knoxville, TN, United States of America

Sudharshan Phani Pardhasaradhi