Other

Lam Research Corporation

Advanced Technology Materials, Inc.

Candescent Technologies Corporation

Cooligy, Inc.

Candescent Intellectual Property Services, Inc.

Sudhakar Gopalakrishnan

Bob Lee Mackey

Xueping Xu

John M Macaulay

Michael James Nystrom

Roger W Barton

Shiyou Pei

Peter Reimer

George B Hopple

Kollengode S Narayanan

Dennis R Smith

Donald R Schropp, Jr

Mark McMaster

Girish Upadhya

Douglas E Werner

Richard Grant Brewer

Norman Chow

James Hom

Brandon R Leong

Adrian Correa

Tien Chih (Eric) Lin

Hae-won Choi

John Haruff

Timothy A Derouin

A mass flow controller assembly includes a housing defining a cavity, a plurality of internal passages, a first inlet, a first outlet, a second inlet, and a second outlet. A valve is connected to the housing, has an inlet fluidly coupled to the second outlet of the housing and an outlet fluidly coupled to the second inlet of the housing. The valve is configured to control fluid flow from the second outlet of the housing to the second inlet of the housing. A microelectromechanical (MEMS) Coriolis flow sensor is arranged in the cavity, includes an inlet fluidly coupled by at least one of the plurality of internal passages to the first inlet of the housing and is configured to measure at least one of a mass flow rate and density of fluid flowing through the MEMS Coriolis flow sensor. An outlet of the MEMS Coriolis flow sensor is fluidly coupled by at least one of the plurality of internal passages to the second outlet of the housing. The second inlet of the housing is fluidly coupled by at least one of the plurality of internal passages to the first outlet of the housing.

MEMS-based Coriolis mass flow controller

Methods and apparatuses for delivering a process gas to a processing chamber are provided. A mass flow controller includes a first flow line for introducing a process fluid and an inlet valve disposed along the first flow line for controlling a flow rate of the process fluid. The mass flow controller includes a second flow line for introducing a carrier fluid into the mass flow controller and a micro-electro-mechanical system (MEMS) Coriolis sensor for providing a density signal and a mass flow rate signal for a mixture of the process fluid and the carrier fluid. The mass flow controller provided includes an outlet valve for controlling a mass flow rate of the mixture that is output by the mass flow controller as well as a controller for operating the inlet valve based on the density signal and for operating the outlet valve based on the mass flow rate signal.

Mass flow controller for substrate processing

The rear panel of an electronics enclosure includes one or more heat exchangers. The rear panel can be cooling door configured to provide access to the cables and equipment located within the electronics enclosure. Such access can be provided by swinging the door open on hinges like a standard door. In the case where there are multiple heat exchangers, the door can be configured into segments, one segment per heat exchanger, and each segment includes hinges so as to be opened independently from the other segments. In some embodiments, each segment swivels open like a standard door. In other embodiments, each segment is configured to swivel up or down about a horizontal axis. In still other embodiments, each segment is configured to be disconnected from the electronics enclosure and moved out of the way, in which case each heat exchanger is connected using either flexible tubing that can be bent out of the way or quick disconnects. In other embodiments, the entire rear door, or each segment of the rear door, can be configured to slide open and closed like a drawer.

Internal access mechanism for a server rack

A flat-panel display is fabricated by a process in which a spacer () having a rough face (or) is positioned between a pair of plate structure (and). When electrons strike the spacer, the roughness in the spacer's face causes the number of secondary electrons that escape the spacer to be reduced, thereby alleviating positive charge buildup on the spacer. As a result, the image produced by the display is improved. The spacer facial roughness can be achieved in various ways such as providing suitable depressions (, or) or/and protuberances (, and) along the spacer's face.

Fabrication of flat-panel display having spacer with rough face for inhibiting secondary electron escape

A spacer structure for a display is disclosed that has a CTE which matches or very closely approximates the CTE of a high quality, desirable glass from which other display structures such as faceplates can be fabricated. The spacer structure is composed of a material that has a CTE that is tailorable within a range that closely matches the CTE range spanned by a variety of readily available high quality, desirable glass from which other display structures such as faceplates can be fabricated. The spacer structure disclosed has a CTE that achieves the foregoing qualities and retains all other properties characterizing requirements for use in displays. Further, the spacer structure disclosed has a CTE that enables great flexibility in the selection of other display components, without having to revamp existing fabrication techniques. Further still, a spacer structure is disclosed that minimizes zero current shift.

High coefficient of thermal expansion spacer structure materials

A flat-panel display contains a pair of plate structure ( and ) separated by a spacer ( ) having a rough face ( or ). When electrons strike the spacer, the roughness in the spacer's face causes the number of secondary electrons that escape the spacer to be reduced, thereby alleviating positive charge buildup on the spacer. As a result, the image produced by the display is improved. The spacer facial roughness can be achieved in various ways such as depressions ( , or ) or/and protuberances ( , and ). Various techniques are presented for manufacturing the display, including the rough-faced spacer.

Flat-panel display having spacer with rough face for inhibiting secondary electron escape

Growing community of inventors

San Jose, CA, United States of America

Sudhakar Gopalakrishnan