Applied Materials, Inc.

Subramaniam V Iyer

Devendrappa Holeyannavar

Naveen Kumar

Patrick Pannese

Douglas MacLeod

Dharma Ratnam Srichurnam

Kenneth Carpenter

Vivek R Rao

A method of purging a substrate carrier at a load port includes: opening a door of a substrate carrier that is delivered to a load port; spraying the substrate carrier with a gas flow responsive to the opening the door; mapping substrates within the substrate carrier to generate a substrate map; determining a process purge state based on the substrate map; and activating one or more inter-substrate nozzle arrays and one or more curtain nozzle arrays using a predefined spray status configuration for the process purge state.

Methods for purging a substrate carrier at a factory interface

Embodiments of the present invention provide systems, apparatus, and methods for purging a substrate carrier. Embodiments include a frame configured to sit proximate to a load port door without interfering with operation of a factory interface or equipment front end module robot; one or more inter-substrate nozzle arrays supported by the frame and configured to spray gas into a substrate carrier; and one or more curtain nozzle arrays supported by the frame and configured to spray gas across an opening of the substrate carrier. Numerous additional aspects are disclosed.

Systems, apparatus, and methods for purging a substrate carrier at a factory interface

A method for operating a smart tool monitoring system is described. The method includes monitoring, by a controller within a smart tool monitoring system, a first parameter associated with a first component internal to the smart tool monitoring system. The method also includes determining, by the controller, whether the first parameter satisfies a first criterion. The method also includes performing a first action in response to a determination that the first parameter satisfies the first criterion. The method also includes receiving a measurement value from a sensor of an article of manufacturing equipment that includes a second component external to the smart tool monitoring system. The method also includes determining, by the controller, whether the measurement value satisfies a second criterion. The method also includes performing a second action in response to a determination that the measurement value satisfies the second criterion.

Smart tool monitoring system

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Maharashtra, India

Subramaniam V Iyer