Applied Materials, Inc.

Subramani Iyer

Kartik Bhupendra Shah

Mehran Behdjat

Preetham Rao

Embodiments described herein include a susceptor for semiconductor processing including an oriented graphite plate that may have a thickness of at least 1 mm. The susceptor may have a support member, and the oriented graphite plate may be disposed on the support member. The support member may have a center thermal conduit and an edge thermal conduit, and may be substantially solid between the center thermal conduit and the edge thermal conduit.

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San Jose, CA, United States of America

Subramani Iyer