Shanghai Micro Electronics Equipment (Group) Co., Ltd.

Subing Duan

Lin Zhang

Hai Xia

Liwei Wu

A six-degree-of-freedom linear motor is disclosed, including a magnet array and a coil group disposed above the magnet array, the magnet array includes a first Halbach magnet array and a second Halbach magnet array, the first Halbach magnet array has a parallelogrammic cross section in a plane defined by X- and Y-axes, the first Halbach magnet array has a first side parallel to the Y-axis and a second side forming an angle of &#x3b8; with the Y-axis, the second Halbach magnet array is in mirror symmetry with the first Halbach magnet array with respect to the Y-axis, and the coil group includes a first, second, third and fourth coil group, each having an axis inclined at an angle of &#x3b8; with respect to the Y-axis, the first and second coil groups are in mirror symmetry with the third and fourth coil groups with respect to the Y-axis, respectively.

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Shanghai, China

Subing Duan