Tohoku University

Subaru Harada

Masaru Nakagawa

Toshiaki Hayakawa

A positioning method includes a layering step of layering a first object and a second object, a detection step of detecting, after the layering step, a first signal obtained from a first array body of the first object, a second signal obtained from a second array body of the first object, a third signal obtained from the second array body of the second object, and a fourth signal obtained from the first array body of the second object, a calculating step of calculating positional deviation between the first object and the second object by respectively fitting the first to fourth signals, and an adjustment step of adjusting the positional deviation. The first array body has a first periodic structure having a period p, and the second array body has a second periodic structure having a period p. Neither the first array body nor the second array body of the first object overlaps the second array body or the first array body of the second object when the first object and the second object are layered.

Growing community of inventors

Sendai, Japan

Subaru Harada