Seoul Viosys Co., Ltd.

Su Yeon Hong

Chang Yeon Kim

Joo Won Choi

Young Wug Kim

Sang Wan Ryu

Jeong Hoon Heo

Exemplary embodiments of the present invention provide a substrate recycling method and a recycled substrate. The method includes separating a substrate having a first surface from an epitaxial layer, performing a first etching of the first surface using electrochemical etching, and performing, after the first etching, a second etching of the first surface using chemical etching, dry etching, or performing, after the first etching, chemical mechanical polishing of the first surface.

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Ansan-si, South Korea

Su Yeon Hong