Samsung Electronics Co., Ltd.

Sungkyunkwan University

Su Jong Kim

Seung-Heon Lee

Sang Won Lee

Munjun Kim

Tae-Jong Han

Young Woon Choi

Jaekang Koh

Jiho Lee

Hyewon Shin

There is a stack visualization method using a stack visualization apparatus including a deposition head. The method comprises collecting a moving speed of the deposition head; collecting laser power information of the deposition head by which a laser is irradiated to a stack; selecting a virtual stack corresponding to the moving speed of the deposition head and the laser power information among a plurality of previously stored virtual stacks based on the moving speed of the deposition head and the laser power information; and visualizing the selected virtual stack through a digital twin model.

Stack visualization method, apparatus, and computer-readable recording medium storing instructions to perform stack visualization method

A three-dimensional semiconductor memory device is disclosed. The device may include a substrate including a cell array region and a connection region provided at an end portion of the cell array region, an electrode structure extending from the cell array region to the connection region, the electrode structure including electrodes sequentially stacked on the substrate, an upper insulating layer provided on the electrode structure, a first horizontal insulating layer provided in the upper insulating layer and extending along the electrodes, and first contact plugs provided on the connection region to penetrate the upper insulating layer and the first horizontal insulating layer. The first horizontal insulating layer may include a material having a better etch-resistive property than the upper insulating layer.

Three-dimensional semiconductor memory device

Growing community of inventors

Suwon-si, South Korea

Su Jong Kim