Samsung Electronics Co., Ltd.

Su Ji Ahn

Jay-Bok Choi

Yong Seok Ahn

Seung Hyung Lee

A semiconductor device includes a substrate having a cell region, a boundary region, a peripheral region sequentially arranged in a first direction, an active pattern extending in the cell region in a second direction forming a first acute angle with respect to the first direction, and a boundary pattern in the cell region and directly adjacent to the boundary region. The boundary pattern includes a first side surface extending in the second direction and a first boundary surface extending in a third direction, which is perpendicular to the first direction, from the first side surface, and the first boundary surface defines a boundary between the cell region and the boundary region.

Growing community of inventors

Seongnam-si, South Korea

Su Ji Ahn